Chemical Mechanical Polishing (CMP) in Magnetic Float Polishing (MFP) of Advanced Ceramic (Silicon Nitride) and Glass (Silicon Dioxide)
2001 ◽
Vol 202-203
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pp. 1-14
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2009 ◽
Vol 156
(12)
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pp. H936
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Keyword(s):
2010 ◽
Vol 371
(1-3)
◽
pp. 131-136
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2008 ◽
Vol 53-54
◽
pp. 131-136
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2013 ◽
Vol 27
(10)
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pp. 2911-2916
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2006 ◽
Vol 24
(6)
◽
pp. 3125
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2012 ◽
Vol 6
(1)
◽
pp. 115-121
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1998 ◽
Vol 145
(11)
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pp. 3919-3925
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Keyword(s):