Effects of Imperfections on Bifurcation of Multi-Layer Microstructures of MEMS under Thermal Loading
Keyword(s):
Bifurcation of multi-layer microstructures subjected to thermal loading can be harmful for reliability and stability of MEMS structures. In this paper, three imperfections of geometry, coefficient of thermal expansion and thermal loading were introduced to investigate their effects on structural bifurcation by finite element simulation. Results show that bifurcation is strongly influenced by the imperfections. With larger deviation of imperfections, it results in a decreasing temperature to trigger the bifurcation and a gradual beginning of it.
2019 ◽
Vol 210
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pp. 327-338
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Keyword(s):
2021 ◽
Vol 263
(6)
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pp. 648-652
2019 ◽
Vol 30
(5)
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pp. 764-777
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2014 ◽
Vol 2014
(1)
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pp. 000483-000487
2020 ◽
Vol 12
(5)
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pp. 168781402092205
2015 ◽
Vol 6
(2)
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pp. 75
2014 ◽
Vol 678
◽
pp. 551-555
Keyword(s):