Tribological Behavior of DLC Films by RF-PECVD at the Elevated Temperature

2007 ◽  
Vol 353-358 ◽  
pp. 1781-1784
Author(s):  
Yong Kyung Cho ◽  
Yun Ha Shin ◽  
Sung Hoon Jeong ◽  
Young Ze Lee
Keyword(s):  
Raman Spectroscopy ◽  
Elevated Temperature ◽  
Vapor Deposition ◽  
Room Temperature ◽  
Tribological Behavior ◽  
Chemical Vapor ◽  
Diamond Like Carbon ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Higher Temperature

The tribological behaviors of Diamond-like carbon (DLC) films, prepared by the radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method, were studied in the room temperature and the elevated temperature. The ball-on-disk tests with DLC films on steel specimens were conducted at a sliding speed of 60 rpm, a load of 10 N, and surrounding temperatures of 25°C and 75°C. The results show that the coefficients of friction and the amounts of wear of DLC films were decreased at higher temperature. After tests the wear tracks of hydrogenated DLC film were analyzed by Raman spectroscopy.

Effect of Various CF4/CH4 Flow Ratios on Structure and Optical Band Gap of Fluorinated Diamond-Like Carbon Thin Films

2010 ◽  
Vol 663-665 ◽  
pp. 312-315
Author(s):  
Jian Rong Xiao ◽  
Tao Tong ◽  
Yan Wei Li ◽  
Xin Hai Li
Keyword(s):  
Thin Films ◽  
Band Gap ◽  
Vapor Deposition ◽  
Gas Flow ◽  
Optical Band Gap ◽  
Chemical Vapor ◽  
Uniform Structure ◽  
Diamond Like Carbon ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Fluorinated diamond-like carbon (F-DLC) thin films are deposited using radio frequency plasma enhanced chemical vapor deposition under various gas flow ratios. The surface morphology of the F-DLC thin films deposited at lower gas flow ratios is a compact and uniform structure, and it became rough with the increase of gas flow ratios. The relative atomic contents of fluorine and chemical bonding configurations of C-Fx (x=1, 2, 3) in the thin films increases with the increase of gas flow ratios. The optical band gap of the thin films presents a decrease of different degree with the increase of gas flow ratios.

Sign in / Sign up

Export Citation Format

Share Document