Homoepitaxial Growth of Cubic Silicon Carbide by Sublimation Epitaxy

2002 ◽  
Vol 389-393 ◽  
pp. 279-282 ◽  
Author(s):  
Tomoaki Furusho ◽  
Toshiyuki Miyanagi ◽  
Yoichi Okui ◽  
Satoru Ohshima ◽  
Shigehiro Nishino
Keyword(s):  
Silicon Carbide ◽  
Homoepitaxial Growth ◽  
Cubic Silicon Carbide

Theoretical study of intrinsic defects in cubic silicon carbide 3C -SiC

2021 ◽  
Vol 103 (19) ◽  
Author(s):  
Peter A. Schultz ◽  
Renee M. Van Ginhoven ◽  
Arthur H. Edwards
Keyword(s):  
Silicon Carbide ◽  
Theoretical Study ◽  
Intrinsic Defects ◽  
Cubic Silicon Carbide

Defect Generation and Annihilation in 3C-SiC-(001) Homoepitaxial Growth by Sublimation

2013 ◽  
Vol 740-742 ◽  
pp. 283-286
Author(s):  
Philip Hens ◽  
Julian Müller ◽  
Günter Wagner ◽  
Rickard Liljedahl ◽  
Erdmann Spiecker ◽  
...  
Keyword(s):  
Chemical Vapor ◽  
Structural Defects ◽  
Silicon Substrates ◽  
Growth Step ◽  
Planar Defects ◽  
Defect Generation ◽  
Defect Clusters ◽  
Homoepitaxial Growth ◽  
Cubic Silicon Carbide ◽  
Thick Layers

In this paper we present a concept on the defect generation and annihilation during the homoepitaxial growth step of cubic silicon carbide by sublimation epitaxy on templates grown by chemical vapor deposition on silicon substrates. Several structural defects like stacking faults, twins and star defects show opposite evolution from the template layer into the sublimation grown material. While single planar defects tend to annihilate with increasing layer thickness, the defect clusters assigned to the star defects are enlarging. These issues contribute to a balance of how to achieve the best possible quality on thick layers.

Oxynitridation of cubic silicon carbide (100) surfaces

1999 ◽  
Vol 17 (5) ◽  
pp. 2629-2633 ◽  
Author(s):  
F. Amy ◽  
L. Douillard ◽  
V. Yu. Aristov ◽  
P. Soukiassian
Keyword(s):  
Silicon Carbide ◽  
Cubic Silicon Carbide

Doping in cubic silicon–carbide

1999 ◽  
Vol 75 (1) ◽  
pp. 88-90 ◽  
Author(s):  
V. A. Gubanov ◽  
C. Y. Fong
Keyword(s):  
Silicon Carbide ◽  
Cubic Silicon Carbide
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