Excitation Power Dependence of Al-Related Features in the LTPL Spectra of 4H-SiC
2005 ◽
Vol 483-485
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pp. 449-452
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Keyword(s):
Recently, a systematic comparison of SIMS measurements with LTPL (Low Temperature Photoluminescence) spectra led us to propose a straightforward empirical calibration of the LTPL intensity versus Al content in 4H-SiC samples. In the present work we analyze the effect of the LTPL excitation power on the intensity of the Al-related features. We examine the influence of the excitation conditions on the calibration curve and determine the limitations of the method.
1985 ◽
Vol 3
(2)
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pp. 622
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2008 ◽
Vol 600-603
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pp. 437-440
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1997 ◽
Vol 101
(11)
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pp. 797-799
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1986 ◽
Vol 35
(6)
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pp. 329-341
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1998 ◽
Vol 105
(1)
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pp. 21-24
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1993 ◽
Vol 180
(2)
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pp. K87-K91
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