Correlation between Strain and Excess Carrier Lifetime in a 3C-SiC Wafer
2012 ◽
Vol 717-720
◽
pp. 305-308
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Keyword(s):
We obtained excess carrier lifetime maps by the microwave photoconductivity decay (µ-PCD) method in a free-standing n-type 3C-SiC wafer, and then we compared the lifetime maps with distributions of strains and defects observed by the optical microscopy and the Raman spectroscopy. We found that the excess carrier lifetimes are short in a strained region in 3C-SiC, which indicates that structural defects exist around a strained region.
2007 ◽
Vol 46
(8A)
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pp. 5057-5061
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2007 ◽
pp. 359-362
2010 ◽
Vol 645-648
◽
pp. 207-210
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2010 ◽
Vol 645-648
◽
pp. 327-330
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2013 ◽
Vol 740-742
◽
pp. 490-493