Laplace Transform Deep Level Transient Spectroscopy Study of the EH6/7 Center
2013 ◽
Vol 740-742
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pp. 645-648
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Keyword(s):
We employed Laplace transform deep level transient spectroscopy (LDLTS) for the resolution of the EH6/7 center in n-type 4H-SiC epilayers. Our results suggest that this technique is effective in separating the emission rates of the EH6 and EH7 levels. From the Arrhenius dependence of the emission rates we could estimate the energy position of EH6 and EH7 as 1.39 and 1.49 eV below the minimum of the conduction band edge, respectively. Generation of of EH6 and EH7 centers by low-energy electron irradiation (dose dependence) was also investigated. At last, a double pulse Laplace DLTS is performed in order to show the electric filed dependence of the emission rates of EH6 and EH7.
2009 ◽
Vol 615-617
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pp. 389-392
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2011 ◽
Vol 178-179
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pp. 130-135
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2013 ◽
Vol 740-742
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pp. 373-376
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Keyword(s):
2013 ◽
Vol 31
(4)
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pp. 572-576
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Keyword(s):