Development of Ferromagnetic Sputtering Targets with High Performance

2020 ◽  
Vol 993 ◽  
pp. 820-825
Author(s):  
Jun Feng Luo ◽  
Yun Yi Fang ◽  
Guo Jin Xu ◽  
Yong Jun Li ◽  
Xiao Dong Xiong
Keyword(s):  
Semiconductor Manufacturing ◽  
High Performance ◽  
Iron Alloy ◽  
Key Factors ◽  
Preparation Methods ◽  
Nickel Iron ◽  
Cobalt Nickel ◽  
Pass Through ◽  
Nickel Iron Alloy ◽  
Nickel Platinum

The preparation methods of high performance ferromagnetic sputtering targets (including cobalt, nickel-platinum and nickel-iron alloy) for advanced semiconductor manufacturing were introduced. The properties of sputtering target, such as pass-through-flux (PTF), and grain size which affect the sputtering performance were well controlled by proper fabrication technique. The key factors that affect sputtering performance were also discussed.

KOVAR A

Alloy Digest ◽  
1953 ◽  
Vol 2 (10) ◽  
Keyword(s):  
Physical Properties ◽  
Surface Treatment ◽  
High Resistance ◽  
Iron Alloy ◽  
Heat Treating ◽  
Nickel Iron ◽  
Cobalt Nickel ◽  
Expansion Curve ◽  
Hard Glass ◽  
Nickel Iron Alloy

Abstract KOVAR A is a cobalt, nickel, iron alloy recommended for sealing into hard glass. Has similar expansion curve as glass, makes firm bond between metal and glass, is easy to machine and form, and has high resistance to thermal shock. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties. It also includes information on forming, heat treating, machining, joining, and surface treatment. Filing Code: Fe-3. Producer or source: Carborundum Company, Refractories Division.

RODAR

Alloy Digest ◽  
1955 ◽  
Vol 4 (3) ◽  
Keyword(s):  
Physical Properties ◽  
Surface Treatment ◽  
High Resistance ◽  
Iron Alloy ◽  
Heat Treating ◽  
Nickel Iron ◽  
Cobalt Nickel ◽  
Expansion Curve ◽  
Hard Glass ◽  
Nickel Iron Alloy

Abstract RODAR is a cobalt, nickel, iron alloy recommended for sealing into hard glass. Has similar expansion curve as glass, makes firm bond between metal and glass, is easy to machine and form, and has high resistance to thermal shock. This datasheet provides information on composition, physical properties, hardness, and tensile properties. It also includes information on forming, heat treating, machining, joining, and surface treatment. Filing Code: Fe-6. Producer or source: Wilbur B. Driver Company.

Production of a Cobalt–Nickel–Iron Alloy from Low-Grade Ore

2020 ◽  
pp. 541-549
Author(s):  
Yotamu R. S. Hara ◽  
Shadreck Chama ◽  
Golden Kaluba ◽  
Douglas Musowoya ◽  
Kennedy Chikontwe ◽  
...  
Keyword(s):  
Iron Alloy ◽  
Low Grade ◽  
Nickel Iron ◽  
Cobalt Nickel ◽  
Nickel Iron Alloy

ALLOY 48

Alloy Digest ◽  
1975 ◽  
Vol 24 (6) ◽  
Keyword(s):  
Iron Alloy ◽  
Heat Treating ◽  
Magnetic Core ◽  
High Permeability ◽  
Nickel Iron ◽  
Core Losses ◽  
Instrument Transformers ◽  
Nickel Iron Alloy ◽  
Shielding Material ◽  
Communication Equipment

Abstract ALLOY 48 is a vacuum-melted, 48% nickel-iron alloy designed for high permeability, and low core losses. It is ideal in applications requiring efficient magnetic core materials, such as audio and instrument transformers, instrument relays, and many other communication equipment devices. It is excellent for rotor and stator laminations, and is also a very effective magnetic shielding material. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties. It also includes information on corrosion resistance as well as forming, heat treating, machining, and joining. Filing Code: Fe-52. Producer or source: Magnetics Specialty Metals Division. See also Alloy Digest Fe-96, April 1992.

NIROMET 46

Alloy Digest ◽  
1969 ◽  
Vol 18 (10) ◽  
Keyword(s):  
Corrosion Resistance ◽  
Physical Properties ◽  
Tensile Properties ◽  
Iron Alloy ◽  
Heat Treating ◽  
Nickel Iron ◽  
Nickel Iron Alloy ◽  
Glass Seals

Abstract Niromet 46 is a 46% nickel-iron alloy having low and controlled coefficient of expansion. It is recommended for metal-to-glass seals and terminal bands in vitreous enameled resistors. This datasheet provides information on composition, physical properties, hardness, and tensile properties. It also includes information on corrosion resistance as well as forming, heat treating, machining, and joining. Filing Code: Fe-39. Producer or source: Wilbur B. Driver Company.

INVAR

Alloy Digest ◽  
1964 ◽  
Vol 13 (3) ◽  
Keyword(s):  
Corrosion Resistance ◽  
High Temperature ◽  
Physical Properties ◽  
Iron Alloy ◽  
Heat Treating ◽  
Temperature Variations ◽  
Nickel Iron ◽  
Dimensional Changes ◽  
Temperature Performance ◽  
Nickel Iron Alloy

Abstract INVAR is a 36% nickel-iron alloy having the lowest coefficient of expansion, recommended for applications requiring no dimensional changes with temperature variations. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties. It also includes information on low and high temperature performance, and corrosion resistance as well as forming, heat treating, machining, joining, and surface treatment. Filing Code: Fe-24. Producer or source: Carpenter.

CARPENTER LOW EXPANSION 39

Alloy Digest ◽  
2004 ◽  
Vol 53 (10) ◽  
Keyword(s):  
Thermal Expansion ◽  
Physical Properties ◽  
Tensile Properties ◽  
Iron Alloy ◽  
Nickel Iron ◽  
Temperature Ranges ◽  
Technology Corporation ◽  
Carpenter Technology Corporation ◽  
Nickel Iron Alloy ◽  
Low Rate

Abstract Carpenter Low Expansion 39 alloy is a 39% nickel iron alloy with a low rate of thermal expansion useful to temperature ranges up to 316 deg C (600 deg F). This datasheet provides information on composition, physical properties, and tensile properties. It also includes information on joining. Filing Code: FE-132. Producer or source: Carpenter Technology Corporation.

CARPENTER INVAR 36 ALLOY

Alloy Digest ◽  
2004 ◽  
Vol 53 (8) ◽  
Keyword(s):  
Thermal Expansion ◽  
High Temperature ◽  
Carbon Steel ◽  
Physical Properties ◽  
Iron Alloy ◽  
Nickel Iron ◽  
Temperature Performance ◽  
Technology Corporation ◽  
Carpenter Technology Corporation ◽  
Nickel Iron Alloy

Abstract Carpenter Invar 36 alloy is a 36% nickel-iron alloy with a rate of thermal expansion approximately one-tenth that of carbon steel at temperatures up to 204 deg C (400 deg F). This datasheet provides information on composition, physical properties, hardness, and tensile properties. It also includes information on low and high temperature performance. Filing Code: FE-131. Producer or source: Carpenter Technology Corporation.

MAGNIFER 36K

Alloy Digest ◽  
1996 ◽  
Vol 45 (6) ◽  
Keyword(s):  
Corrosion Resistance ◽  
Physical Properties ◽  
Tensile Properties ◽  
Electrical Resistance ◽  
Iron Alloy ◽  
Heat Treating ◽  
Soft Magnetic ◽  
Nickel Iron ◽  
Saturation Induction ◽  
Nickel Iron Alloy

Abstract Magnifer 36K is a soft-magnetic nickel-iron alloy with 36% nickel. It has a saturation induction of 1.3 T and a rather high electrical resistance of 0.75 ohm mm2/m. This datasheet provides information on composition, physical properties, hardness, and tensile properties. It also includes information on corrosion resistance as well as forming, heat treating, machining, and joining. Filing Code: FE-110. Producer or source: VDM Technologies Corporation.

SANDMEYER SSC INVAR 36

Alloy Digest ◽  
2012 ◽  
Vol 61 (2) ◽  
Keyword(s):  
Corrosion Resistance ◽  
Coefficient Of Thermal Expansion ◽  
Iron Alloy ◽  
Gas Production ◽  
Liquefied Natural Gas ◽  
Cryogenic Temperatures ◽  
Steel Company ◽  
Nickel Iron ◽  
Composite Tooling ◽  
Nickel Iron Alloy

Abstract SSC Invar 36 was developed for use in applications where dimensional stability is essential. It is a nickel-iron alloy with a very low coefficient of thermal expansion from cryogenic temperatures to 200 deg C (390 deg F). It is utilized in aerospace composite tooling and die applications, as well as laser components, and cryogenic components and piping: liquefied natural gas production, storage, and transportation. This datasheet provides information on composition, physical properties, and tensile properties. It also includes information on corrosion resistance as well as forming. Filing Code: Fe-158. Producer or source: Sandmeyer Steel Company. Originally published December 2011, revised February 2012.

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