Selective Nickel Platinum Removal without Titanium Nitride Metal Gate Corrosion

During silicide formation, unreacted NiPt metals is traditionally removed either by aqua regia (ESH concern) or SPM. This latter can easily degrade the device yield in HKMG (High K Metal Gate) nodes if the metal gates (usually TiN based) aren’t perfectly encapsulated. First some new characterizations are presented to better understand the NiPt metal alloy removal, then a new solution is given to be able to remove this alloy without degrading HKMG materials.

Photocatalytic Reduction of CO2 over Metal/BaTiO3 Catalysts

The paper presents the results of experimental studies of a photoactive catalyst in the form of barium titanate fibers with deposited particles of nickel, platinum and gold. Barium titanate fibers were synthesized by the molten salt method. The obtained barium titanate fibers were studied by SEM, TEM, XRD, and Raman spectroscopy. Photocatalytic studies showed that barium titanate fibers with platinum nanoparticles are the most active of the three prepared Metal/BaTiO3 samples.

Nanocomposite Formulation of Ferulic Acid with Different Metals Using Computational Method

Formulation of Nanoparticle – drug composite is becoming a growing field of research in today’s scientific community. In comparison to the research on the experimental methods for these formulations and their application in various fields, the study of the interaction between drug and nanoparticle is less. In this study, we are reporting about the selection of metals for the formulation of nanocomposite with ferulic acid which is a well-known bioflavonoid having different medicinal activities. Ferulic acid contains only one –OH group which may reduce the conflict of selecting the metal atom binding site. For our study, we considered twelve metals which have been reported for having the potentiality to synthesis nanoparticles. These metals are gold, silver, copper, iron, zinc, nickel, platinum, palladium, rhodium, ruthenium, cadmium, and antimony. To mimic the actual nanocomposite structure, one metal atom has interacted with two molecules of ferulic acid. All nanocomposite model structures were designed using Avogadro software for windows. It was subjected to energy minimization and O-metal-O bond angle calculation. From the energy levels, it was observed that cadmium exhibited the lowest energy level and antimony showed the highest energy level suggesting their nanocomposite model structures as the most stable and unstable formulation respectively.

Development of Ferromagnetic Sputtering Targets with High Performance

The preparation methods of high performance ferromagnetic sputtering targets (including cobalt, nickel-platinum and nickel-iron alloy) for advanced semiconductor manufacturing were introduced. The properties of sputtering target, such as pass-through-flux (PTF), and grain size which affect the sputtering performance were well controlled by proper fabrication technique. The key factors that affect sputtering performance were also discussed.