Oxygen Control for Wet Clean Process on Single Wafer Platform

Wet processing with low oxygen content may provides some advantages, however, full control to avoid oxygen uptake during wafer processing remains a challenge for short process industrialization on single wafer tool. Inline oxygen concentration monitoring was used for process optimization. Then, cobalt etch in diluted HF solutions was evaluated depending on the recorded oxygen concentration and hardware available options for atmosphere control in the process chamber.

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Influences of haemoglobin concentration and temperature on oxygen uptake of Daphnia magna under low oxygen concentration

Comparative Biochemistry and Physiology Part A Physiology ◽

10.1016/0300-9629(81)90155-9 ◽

1981 ◽

Vol 69 (4) ◽

pp. 679-682 ◽

Cited By ~ 10

Author(s):

Kobayashi Michiyori

Keyword(s):

Oxygen Uptake ◽

Daphnia Magna ◽

Oxygen Concentration ◽

Haemoglobin Concentration ◽

Low Oxygen ◽

Low Oxygen Concentration

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The chemistry of flavins and flavoproteins. Aerobic photochemistry

Biochemical Journal ◽

10.1042/bj1160733 ◽

1970 ◽

Vol 116 (4) ◽

pp. 733-743 ◽

Cited By ~ 39

Author(s):

G. R. Penzer

Keyword(s):

Oxygen Uptake ◽

Oxygen Concentration ◽

Hydrogen Abstraction ◽

Reaction Rates ◽

Acid Oxidase ◽

Type I ◽

Low Oxygen ◽

Amino Acid Oxidase ◽

Rate Determining Step ◽

Natural Amino Acids

1. When a mixture of FMN and a reducing substrate (e.g. unprotonated amine) is illuminated oxygen is consumed. 2. The rate of oxygen uptake increases as oxygen concentration falls with some substrates (type I reaction), but with other substrates (typically aromatic compounds) the rate falls as the oxygen concentration falls (type II reaction). 3. The kinetics of type I reactions with EDTA, dl-α-phenylglycine and diethanolamine are all consistent with a mechanism in which the rate-determining step, hydrogen abstraction by the FMN triplet, is followed by rapid reoxidation of reduced FMN by oxygen. The reaction is faster at low oxygen concentrations because oxygen quenches the triplet. 4. The sensitivity of reaction rates to substituents in dl-α-phenylglycine can be described by a Hammett ρ value of -0.6. 5. Individual rate constants for quenching and reaction of the FMN triplet with substrate were calculated (2.4×108 and 2.1×107m-1s-1 respectively for EDTA) on the assumption that oxygen quenches the triplet in a diffusion-controlled reaction. 6. The pH-dependences of oxygen uptake rates with six natural amino acids as substrates were measured. 7. Photoinactivations of l-glutamate dehydrogenase and d-amino acid oxidase by FMN were demonstrated.

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Respiratory metabolism of Azotobacter vinelandii cells at oxygen concentrations that initially range from suboptimal to supraoptimal for nitrogenase activity

Canadian Journal of Microbiology ◽

10.1139/m91-051 ◽

1991 ◽

Vol 37 (4) ◽

pp. 321-325 ◽

Cited By ~ 2

Author(s):

Jay B. Peterson

Keyword(s):

Oxygen Uptake ◽

Oxygen Concentration ◽

Azotobacter Vinelandii ◽

Nitrogenase Activity ◽

Low Oxygen ◽

Total Oxygen ◽

Apparent Affinity ◽

Lower Oxygen ◽

Effect Of Oxygen ◽

Oxygen Concentrations

The effects of three low oxygen concentrations on nitrogenase activity, total oxygen uptake, and respiratory parameters (Vmax and Ks(O2) of N2-grown Azotobacter vinelandii were studied in acetylene reduction assays during a 2-h incubation. The cell suspensions were taken from cultures grown at low aeration. Total oxygen uptake was higher with each increment in oxygen concentration. The highest oxygen concentration was initially supraoptimal for nitrogenase activity. The Ks(O2) values, representing the apparent affinity of the respiration system for oxygen, increased during the incubation of cells at the highest oxygen concentration. The Ks(O2) values at the two lower oxygen concentrations decreased and were very similar. A small effect of oxygen on the Vmax was observed. These results show that the metabolism determining the apparent affinity of the system for oxygen responds to the oxygen concentrations. Furthermore, this metabolism did not substantially increase the Ks(O2) unless the oxygen concentration was high enough to inhibit nitrogenase activity, indicating that the two processes may be linked. Key words: Azotobacter, oxygen regulation, nitrogen fixation.

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Carbon and the Kinetics of Oxygen Precipitation in Silicon

MRS Proceedings ◽

10.1557/proc-14-147 ◽

1982 ◽

Vol 14 ◽

Cited By ~ 3

Author(s):

R.F. Pinizzotto ◽

S. Marks

Keyword(s):

Oxygen Content ◽

Oxygen Concentration ◽

Carbon Concentration ◽

Oxygen Solubility ◽

Low Oxygen ◽

Subsequent Increase ◽

High Oxygen Content ◽

Oxygen Precipitation ◽

Precipitate Growth ◽

Initial Oxygen

ABSTRACTOxygen precipitation in Czochralski silicon has been studied as a function of anneal time, oxygen concentration and carbon concentration using FTIR. It was found that the oxygen supersaturation controls the precipitation kinetics in high oxygen content samples, whereas the carbon concentration is of prime importance in low oxygen content samples. The decrease in sustitutional carbon concentration after nucleation and its subsequent increase with extended growth anneals supports the view that carbon affects precipitate nucleation, but not precipitate growth. The measured oxygen solubility at 1000°C was found to depend on both the initial oxygen concentration and the initial carbon concentration.

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The biochemistry of drugs and doping methods used to enhance aerobic sport performance

Essays in Biochemistry ◽

10.1042/bse0440063 ◽

2008 ◽

Vol 44 ◽

pp. 63-84 ◽

Cited By ~ 7

Author(s):

Chris E. Cooper

Keyword(s):

Oxygen Uptake ◽

Oxygen Content ◽

Oxygen Delivery ◽

Sport Performance ◽

Blood Substitutes ◽

Altitude Training ◽

Blood Oxygen ◽

Oxygen Carriers ◽

Sports Performance ◽

Blood Doping

Optimum performance in aerobic sports performance requires an efficient delivery to, and consumption of, oxygen by the exercising muscle. It is probable that maximal oxygen uptake in the athlete is multifactorial, being shared between cardiac output, blood oxygen content, muscle blood flow, oxygen diffusion from the blood to the cell and mitochondrial content. Of these, raising the blood oxygen content by raising the haematocrit is the simplest acute method to increase oxygen delivery and improve sport performance. Legal means of raising haematocrit include altitude training and hypoxic tents. Illegal means include blood doping and the administration of EPO (erythropoietin). The ability to make EPO by genetic means has resulted in an increase in its availability and use, although it is probable that recent testing methods may have had some impact. Less widely used illegal methods include the use of artificial blood oxygen carriers (the so-called ‘blood substitutes’). In principle these molecules could enhance aerobic sports performance; however, they would be readily detectable in urine and blood tests. An alternative to increasing the blood oxygen content is to increase the amount of oxygen that haemoglobin can deliver. It is possible to do this by using compounds that right-shift the haemoglobin dissociation curve (e.g. RSR13). There is a compromise between improving oxygen delivery at the muscle and losing oxygen uptake at the lung and it is unclear whether these reagents would enhance the performance of elite athletes. However, given the proven success of blood doping and EPO, attempts to manipulate these pathways are likely to lead to an ongoing battle between the athlete and the drug testers.

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