Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
Keyword(s):
Megasonic cleaning is one of the promising technologies to remove the particles during semiconductor processing. Acoustic bubble cavitation plays a key role in removing the particles. In this work, the effect of an anionic surfactant sodium dodecyl sulfate (SDS) on a bubble in the presence of hydrogen dissolved DIW water was studied. The bubble dynamics were observed using a high-speed camera. It was found that with the increase of surfactant the bubble characteristics were changed very significantly. Several parameters affecting the bubble dynamics were investigated.
2018 ◽
Vol 28
(2)
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pp. 65-71
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2021 ◽
Vol 866
(1)
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pp. 012025
2015 ◽
Vol 37
(11)
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pp. 1645-1654
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2021 ◽
Vol 240
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pp. 108906
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2018 ◽
Vol 552
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pp. 75-80
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1998 ◽
Vol 41
(2)
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pp. 139-143
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Keyword(s):
2011 ◽
Vol 32
(10)
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pp. 1452-1458
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