Low-Temperature Crystallization of Poly-SiGe Thin-Films by Solid Phase Crystallization

2003 ◽  
Vol 93 ◽  
pp. 231-236 ◽  
Author(s):  
Kouichi Nakahata ◽  
M. Isomura ◽  
K. Wakisaka
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Solid Phase ◽  
Solid Phase Crystallization ◽  
Low Temperature Crystallization ◽  
Temperature Crystallization

A 9.5-in. 1.3-Mpixel low-temperature poly-Si TFT-LCD fabricated by solid-phase crystallization of very thin films and an ECR-CVD gate insulator

1993 ◽  
Vol 1 (2) ◽  
pp. 203 ◽  
Author(s):  
Thomas W. Little ◽  
Hideki Koike ◽  
Ken-ichi Takahara ◽  
Takashi Nakazawa ◽  
Hiroyuki Ohshima
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Solid Phase ◽  
Gate Insulator ◽  
Solid Phase Crystallization

Low-temperature crystallization and paraelectric–ferroelectric phase transformation in nanoscale ZrO2 thin films induced by atomic layer plasma treatment

2020 ◽  
Vol 8 (11) ◽  
pp. 3669-3677
Author(s):  
Sheng-Han Yi ◽  
Kuei-Wen Huang ◽  
Hsin-Chih Lin ◽  
Miin-Jang Chen
Keyword(s):  
Thin Films ◽  
Phase Transformation ◽  
Low Temperature ◽  
Plasma Treatment ◽  
Ferroelectric Phase ◽  
Atomic Layer ◽  
Treatment Technique ◽  
Low Temperature Crystallization ◽  
Temperature Crystallization

Crystallization and ferroelectricity with high endurance are achieved in ZrO2 thin films at low temperature using an atomic layer plasma treatment technique.

Lattice Guiding for Low Temperature Crystallization of Rhombohedral Perovskite-Structured Oxide Thin Films

2010 ◽  
Vol 10 (2) ◽  
pp. 761-764 ◽  
Author(s):  
Sharath Sriram ◽  
Madhu Bhaskaran ◽  
David R. G. Mitchell ◽  
Arnan Mitchell
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Oxide Thin Films ◽  
Low Temperature Crystallization ◽  
Temperature Crystallization

A study on low-temperature crystallization of SrBi2Ta2O9 thin films prepared by sol-gel method using steam curing process

1999 ◽  
Vol 26 (1-4) ◽  
pp. 187-195 ◽  
Author(s):  
Yoshihiro Sawada ◽  
Hideya Kobari ◽  
Yoshimi Sato ◽  
Akira Hashimoto ◽  
Ichiro Koiwa ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Sol Gel ◽  
Curing Process ◽  
Steam Curing ◽  
Gel Method ◽  
Sol Gel Method ◽  
Low Temperature Crystallization ◽  
Temperature Crystallization
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