Analysis of Possibility of Growth of Several Epitaxial Layers Simultaneously In Gas Phases Framework One Technological Process. On Possibility to Change Properties of Epitaxial Layers
2016 ◽
Vol 6
(4)
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pp. 270-277
1998 ◽
Vol 184-185
(1-2)
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pp. 1209-1213
1988 ◽
Vol 49
(C4)
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pp. C4-693-C4-696
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Keyword(s):
2017 ◽
Vol 49
(6)
◽
pp. 49-61
Keyword(s):