scholarly journals Operation of thin-film thermoelectric generator of Ge-rich poly-Ge1-x Sn x on SiO2 fabricated by a low thermal budget process

2019 ◽  
Vol 12 (5) ◽  
pp. 051016
Author(s):  
Kouta Takahashi ◽  
Hiroshi Ikenoue ◽  
Mitsuo Sakashita ◽  
Osamu Nakatsuka ◽  
Shigeaki Zaima ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermoelectric Generator ◽  
Budget Process ◽  
Thermal Budget ◽  
Low Thermal Budget

Effects of Microwave Annealing on Nitrogenated Amorphous In-Ga-Zn-O Thin-Film Transistor for Low Thermal Budget Process Application

2013 ◽  
Vol 34 (9) ◽  
pp. 1157-1159 ◽  
Author(s):  
Chur-Shyang Fuh ◽  
Po-Tsun Liu ◽  
Li-Feng Teng ◽  
Sih-Wei Huang ◽  
Yao-Jen Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistor ◽  
Budget Process ◽  
Thermal Budget ◽  
Microwave Annealing ◽  
Low Thermal Budget

Low thermal budget fabrication of poly-Ge1-xSnx thin film thermoelectric generator

2018 ◽  
Author(s):  
Kouta Takahashi ◽  
Hiroshi Ikenoue ◽  
Mitsuo Sakashita ◽  
Osamu Nakatsuka ◽  
Shigeaki Zaima ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermoelectric Generator ◽  
Thermal Budget ◽  
Low Thermal Budget

scholarly journals Low-temperature and low thermal budget fabrication of polycrystalline silicon thin-film transistors

1996 ◽  
Vol 17 (11) ◽  
pp. 503-505 ◽  
Author(s):  
Hsiao-Yi Lin ◽  
Chun-Yen Chang ◽  
Tan Fu Lei ◽  
Feng-Ming Liu ◽  
Wen-Luh Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film ◽  
Thermal Budget ◽  
Low Thermal Budget

scholarly journals Pulse Thermal Processing for Low Thermal Budget Integration of IGZO Thin Film Transistors

2015 ◽  
Vol 3 (3) ◽  
pp. 297-301 ◽  
Author(s):  
Joo Hyon Noh ◽  
Pooran C. Joshi ◽  
Teja Kuruganti ◽  
Philip D. Rack
Keyword(s):  
Thin Film ◽  
Thermal Processing ◽  
Thin Film Transistors ◽  
Thermal Budget ◽  
Low Thermal Budget
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