Water-Related Instability in Low-Temperature Polycrystalline Silicon Thin-Film Transistors Caused by Self-Heating

2011 ◽  
Vol 50 (3S) ◽  
pp. 03CB04
Author(s):  
Toshiaki Tsuchiya ◽  
Shinzo Tsuboi ◽  
Genshiro Kawachi ◽  
Masakiyo Matsumura
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film ◽  
Self Heating

Effect of ELA Energy Density on Self-Heating Stress in Low-Temperature Polycrystalline Silicon Thin-Film Transistors

2020 ◽  
Vol 67 (8) ◽  
pp. 3163-3166
Author(s):  
Shin-Ping Huang ◽  
Hong-Chih Chen ◽  
Po-Hsun Chen ◽  
Yu-Zhe Zheng ◽  
Ann-Kuo Chu ◽  
...  
Keyword(s):  
Thin Film ◽  
Energy Density ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film ◽  
Self Heating

Water-Related Instability in Low-Temperature Polycrystalline Silicon Thin-Film Transistors Caused by Self-Heating

2011 ◽  
Vol 50 (3) ◽  
pp. 03CB04 ◽  
Author(s):  
Toshiaki Tsuchiya ◽  
Shinzo Tsuboi ◽  
Genshiro Kawachi ◽  
Masakiyo Matsumura
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film ◽  
Self Heating

Reliability of Low Temperature Polycrystalline Silicon Thin-Film Transistors with Ultrathin Gate Oxide

2007 ◽  
Vol 46 (7A) ◽  
pp. 4021-4027 ◽  
Author(s):  
Hitoshi Ueno ◽  
Yuta Sugawara ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Gate Oxide ◽  
Silicon Thin Film
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