Electrical Characteristics of Low-Temperature Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Thin-Film Transistors with Six-Step Photomask Structure

Sang-Jin Lee; Jae-Hoon Park; Kum-Mi Oh; Seok-Woo Lee; Kyung-Eon Lee; Woo-Sup Shin; Myung-chul Jun; Yong-Suk Yang; Yong-Kee Hwang

doi:10.7567/jjap.50.061401

Electrical Characteristics of Low-Temperature Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Thin-Film Transistors with Six-Step Photomask Structure

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.061401 ◽

2011 ◽

Vol 50 (6R) ◽

pp. 061401 ◽

Cited By ~ 1

Author(s):

Sang-Jin Lee ◽

Jae-Hoon Park ◽

Kum-Mi Oh ◽

Seok-Woo Lee ◽

Kyung-Eon Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Metal Oxide ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Electrical Characteristics ◽

Semiconductor Thin Film

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Electrical Characteristics of Low-Temperature Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Thin-Film Transistors with Six-Step Photomask Structure

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.061401 ◽

2011 ◽

Vol 50 (6) ◽

pp. 061401

Author(s):

Sang-Jin Lee ◽

Jae-Hoon Park ◽

Kum-Mi Oh ◽

Seok-Woo Lee ◽

Kyung-Eon Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Metal Oxide ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Electrical Characteristics ◽

Semiconductor Thin Film

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Complementary metal-oxide-semiconductor thin-film transistor circuits from a high-temperature polycrystalline silicon process on steel foil substrates

IEEE Transactions on Electron Devices ◽

10.1109/ted.2002.804702 ◽

2002 ◽

Vol 49 (11) ◽

pp. 1993-2000 ◽

Cited By ~ 34

Author(s):

Ming Wu ◽

Xiang-Zheng Bo ◽

J.C. Sturm ◽

S. Wagner

Keyword(s):

Thin Film ◽

High Temperature ◽

Metal Oxide ◽

Polycrystalline Silicon ◽

Thin Film Transistor ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Transistor Circuits ◽

Semiconductor Thin Film

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A High-Speed and Low-Power Inverter Circuit Using p-Channel Metal Oxide Semiconductor Low-Temperature Polycrystalline Silicon Thin Film Transistors

Japanese Journal of Applied Physics ◽

10.1143/jjap.48.03b010 ◽

2009 ◽

Vol 48 (3) ◽

pp. 03B010 ◽

Cited By ~ 1

Author(s):

Seunghun Hong ◽

Jaehwan Kim ◽

Byong-Deok Choi

Keyword(s):

Thin Film ◽

Low Temperature ◽

Metal Oxide ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Speed ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Silicon Thin Film ◽

Inverter Circuit

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Wearable 1 V operating thin-film transistors with solution-processed metal-oxide semiconductor and dielectric films fabricated by deep ultra-violet photo annealing at low temperature

Scientific Reports ◽

10.1038/s41598-019-44948-z ◽

2019 ◽

Vol 9 (1) ◽

Cited By ~ 10

Author(s):

Byoung-Soo Yu ◽

Jun-Young Jeon ◽

Byeong-Cheol Kang ◽

Woobin Lee ◽

Yong-Hoon Kim ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Metal Oxide ◽

Thin Film Transistors ◽

Ultra Violet ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Dielectric Films ◽

Solution Processed

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A Two-Layer Stacked Polycrystalline Silicon Thin Film Transistor Complementary Metal Oxide Semiconductor Inverters Using Laser Crystallized Channel with High-kand Metal Gate on Si

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.3091 ◽

2008 ◽

Vol 47 (4) ◽

pp. 3091-3094 ◽

Cited By ~ 3

Author(s):

Soon-Young Oh ◽

Chang-Geun Ahn ◽

Jong-Heon Yang ◽

Won-Ju Cho ◽

Moon-Gyu Jang

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Polycrystalline Silicon ◽

Thin Film Transistor ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Metal Gate ◽

Silicon Thin Film

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Comprehensive Study on Reliability of Low-Temperature Poly-Si Thin-Film Transistors under Dynamic Complimentary Metal-Oxide Semiconductor Operations

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.2414 ◽

2002 ◽

Vol 41 (Part 1, No. 4B) ◽

pp. 2414-2418 ◽

Cited By ~ 6

Author(s):

Yukiharu Uraoka ◽

Hiroshi Yano ◽

Tomoaki Hatayama ◽

Takashi Fuyuki

Keyword(s):

Thin Film ◽

Low Temperature ◽

Metal Oxide ◽

Thin Film Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Si Thin Film ◽

Comprehensive Study

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High performing metal–oxide semiconductor thin-film transistors

VLSI and Post-CMOS Electronics. Volume 1: Design, modelling and simulation ◽

10.1049/pbcs073f_ch12 ◽

2019 ◽

pp. 287-311

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Thin Film Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Performing ◽

Semiconductor Thin Film

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Metal Oxide Semiconductor Thin-Film Transistors: Device Physics and Compact Modeling

Outlook and Challenges of Nano Devices, Sensors, and MEMS ◽

10.1007/978-3-319-50824-5_3 ◽

2017 ◽

pp. 69-98

Author(s):

Wanling Deng ◽

Jielin Fang ◽

Xixiong Wei ◽

Fei Yu

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Thin Film Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Compact Modeling ◽

Device Physics ◽

Semiconductor Thin Film

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Determination of bulk and interface density of states in metal oxide semiconductor thin-film transistors by using capacitance–voltage characteristics

The European Physical Journal Applied Physics ◽

10.1051/epjap/2017170179 ◽

2017 ◽

Vol 80 (1) ◽

pp. 10103 ◽

Cited By ~ 6

Author(s):

Xixiong Wei ◽

Wanling Deng ◽

Jielin Fang ◽

Xiaoyu Ma ◽

Junkai Huang

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Density Of States ◽

Thin Film Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Capacitance Voltage ◽

Semiconductor Thin Film

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A model of electrical conduction across the grain boundaries in polycrystalline-silicon thin film transistors and metal oxide semiconductor field effect transistors

Journal of Applied Physics ◽

10.1063/1.3173179 ◽

2009 ◽

Vol 106 (2) ◽

pp. 024504 ◽

Cited By ~ 5

Author(s):

Kiran Sharma ◽

D. P. Joshi

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Electrical Conduction ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Field Effect ◽

Field Effect Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Silicon Thin Film

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