A Two-Layer Stacked Polycrystalline Silicon Thin Film Transistor Complementary Metal Oxide Semiconductor Inverters Using Laser Crystallized Channel with High-kand Metal Gate on Si

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.3091 ◽

2008 ◽

Vol 47 (4) ◽

pp. 3091-3094 ◽

Author(s):

Soon-Young Oh ◽

Chang-Geun Ahn ◽

Jong-Heon Yang ◽

Won-Ju Cho ◽

Moon-Gyu Jang

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Polycrystalline Silicon ◽

Thin Film Transistor ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Silicon Thin Film

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Complementary metal-oxide-semiconductor thin-film transistor circuits from a high-temperature polycrystalline silicon process on steel foil substrates

IEEE Transactions on Electron Devices ◽

10.1109/ted.2002.804702 ◽

2002 ◽

Vol 49 (11) ◽

pp. 1993-2000 ◽

Author(s):

Ming Wu ◽

Xiang-Zheng Bo ◽

J.C. Sturm ◽

S. Wagner

Keyword(s):

Thin Film ◽

High Temperature ◽

Metal Oxide ◽

Polycrystalline Silicon ◽

Thin Film Transistor ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Transistor Circuits ◽

Semiconductor Thin Film

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A High-Speed and Low-Power Inverter Circuit Using p-Channel Metal Oxide Semiconductor Low-Temperature Polycrystalline Silicon Thin Film Transistors

Japanese Journal of Applied Physics ◽

10.1143/jjap.48.03b010 ◽

2009 ◽

Vol 48 (3) ◽

pp. 03B010 ◽

Author(s):

Seunghun Hong ◽

Jaehwan Kim ◽

Byong-Deok Choi

Keyword(s):

Thin Film ◽

Low Temperature ◽

Metal Oxide ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Silicon Thin Film ◽

Inverter Circuit

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A model of electrical conduction across the grain boundaries in polycrystalline-silicon thin film transistors and metal oxide semiconductor field effect transistors

Journal of Applied Physics ◽

10.1063/1.3173179 ◽

2009 ◽

Vol 106 (2) ◽

pp. 024504 ◽

Author(s):

Kiran Sharma ◽

D. P. Joshi

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Electrical Conduction ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Field Effect ◽

Field Effect Transistors ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Silicon Thin Film

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Electrical Characteristics of Low-Temperature Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Thin-Film Transistors with Six-Step Photomask Structure

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.061401 ◽

2011 ◽

Vol 50 (6) ◽

pp. 061401

Author(s):

Sang-Jin Lee ◽

Jae-Hoon Park ◽

Kum-Mi Oh ◽

Seok-Woo Lee ◽

Kyung-Eon Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Metal Oxide ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Electrical Characteristics ◽

Semiconductor Thin Film

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Application of liquid phase deposited silicon dioxide to metal-oxide-semiconductor capacitor and amorphous silicon thin-film transistor

IEEE Transactions on Electron Devices ◽

10.1109/16.485542 ◽

1996 ◽

Vol 43 (4) ◽

pp. 599-604 ◽

Author(s):

Jenq-Shiuh Chou ◽

Si-Chen Lee

Keyword(s):

Thin Film ◽

Liquid Phase ◽

Metal Oxide ◽

Silicon Dioxide ◽

Amorphous Silicon ◽

Thin Film Transistor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Silicon Thin Film ◽

Metal Oxide Semiconductor Capacitor

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Electrical Characteristics of Low-Temperature Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Thin-Film Transistors with Six-Step Photomask Structure

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.061401 ◽

2011 ◽

Vol 50 (6R) ◽

pp. 061401 ◽

Author(s):

Sang-Jin Lee ◽

Jae-Hoon Park ◽

Kum-Mi Oh ◽

Seok-Woo Lee ◽

Kyung-Eon Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Metal Oxide ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Electrical Characteristics ◽

Semiconductor Thin Film

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Analysis of Carrier Mobility in Amorphous Metal-Oxide Semiconductor Thin-Film Transistor using Hall Effect

IEEE Electron Device Letters ◽

10.1109/led.2020.2993268 ◽

2020 ◽

pp. 1-1

Author(s):

Kota Imanishi ◽

Tokiyoshi Matsuda ◽

Mutsumi Kimura

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Hall Effect ◽

Carrier Mobility ◽

Thin Film Transistor ◽

Amorphous Metal ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Thin Film ◽

Amorphous Metal Oxide

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Metal oxide semiconductor thin-film transistor backplanes for displays and imaging

MRS Bulletin ◽

10.1557/s43577-021-00228-8 ◽

2022 ◽

Author(s):

Denis Striakhilev ◽

Byung-kyu Park ◽

Shuenn-Jiun Tang

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Thin Film Transistor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Thin Film

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Characterization of High-Performance Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Circuits

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.51 ◽

2007 ◽

Vol 46 (1) ◽

pp. 51-55 ◽

Author(s):

Genshiro Kawachi ◽

Yoshiaki Nakazaki ◽

Hiroyuki Ogawa ◽

Masayuki Jyumonji ◽

Noritaka Akita ◽

...

Keyword(s):

Metal Oxide ◽

Polycrystalline Silicon ◽

High Performance ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Circuits

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Mechanical stress effects on Pb(Zr,Ti)O3 thin-film ferroelectric capacitors embedded in a standard complementary metal-oxide-semiconductor process

Applied Physics Letters ◽

10.1063/1.4881596 ◽

2014 ◽

Vol 104 (22) ◽

pp. 222908 ◽

Author(s):

Antonio G. Acosta ◽

John A. Rodriguez ◽

Toshikazu Nishida

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Mechanical Stress ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Stress Effects ◽

Ferroelectric Capacitors ◽

Semiconductor Process

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