High-Performance Excimer-Laser-Crystallized Polycrystalline Silicon Thin-Film Transistors with the Pre-Patterned Recessed Channel

Chao-Lung Wang; Huang-Chung Cheng; I-Che Lee; Chun-Yu Wu; Yu-Ting Cheng; Po-Yu Yang

doi:10.7567/jjap.51.066502

High-Performance Excimer-Laser-Crystallized Polycrystalline Silicon Thin-Film Transistors with the Pre-Patterned Recessed Channel

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.066502 ◽

2012 ◽

Vol 51 (6R) ◽

pp. 066502 ◽

Cited By ~ 1

Author(s):

Chao-Lung Wang ◽

Huang-Chung Cheng ◽

I-Che Lee ◽

Chun-Yu Wu ◽

Yu-Ting Cheng ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Silicon Thin Film ◽

Recessed Channel

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High-Performance Excimer-Laser-Crystallized Polycrystalline Silicon Thin-Film Transistors with the Pre-Patterned Recessed Channel

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.066502 ◽

2012 ◽

Vol 51 ◽

pp. 066502

Author(s):

Chao-Lung Wang ◽

Huang-Chung Cheng ◽

I-Che Lee ◽

Chun-Yu Wu ◽

Yu-Ting Cheng ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Silicon Thin Film ◽

Recessed Channel

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High-Performance Polycrystalline Silicon Thin-Film Transistors with Two-Dimensional Location Control of the Grain Boundary via Excimer Laser Crystallization

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2012.6308 ◽

2012 ◽

Vol 12 (7) ◽

pp. 5505-5509 ◽

Cited By ~ 1

Author(s):

Chao-Lung Wang ◽

I.-Che Lee ◽

Chun-Yu Wu ◽

Chan-Yu Liao ◽

Yu-Ting Cheng ◽

...

Keyword(s):

Thin Film ◽

Grain Boundary ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Two Dimensional ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Excimer Laser Crystallization

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High-Performance Polycrystalline Silicon Thin-Film Transistors Fabricated by High-Temperature Process with Excimer Laser Annealing

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.3293 ◽

2004 ◽

Vol 43 (6A) ◽

pp. 3293-3296 ◽

Cited By ~ 16

Author(s):

Hiroaki Jiroku ◽

Mitsutoshi Miyasaka ◽

Satoshi Inoue ◽

Yoshifumi Tsunekawa ◽

Tatsuya Shimoda

Keyword(s):

Thin Film ◽

High Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

High Temperature Process

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Threshold voltage of excimer-laser-annealed polycrystalline silicon thin-film transistors

Applied Physics Letters ◽

10.1063/1.126370 ◽

2000 ◽

Vol 76 (17) ◽

pp. 2442-2444 ◽

Cited By ~ 15

Author(s):

C. T. Angelis ◽

C. A. Dimitriadis ◽

F. V. Farmakis ◽

J. Brini ◽

G. Kamarinos ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Threshold Voltage ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film

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High-performance polycrystalline silicon thin-film transistors prepared via the laser crystallization of the prepatterned channel layer on the bottom-gate structure

Thin Solid Films ◽

10.1016/j.tsf.2012.09.048 ◽

2013 ◽

Vol 529 ◽

pp. 421-425 ◽

Cited By ~ 4

Author(s):

Chao-Lung Wang ◽

I-Che Lee ◽

Chun-Yu Wu ◽

Yu-Ting Cheng ◽

Po-Yu Yang ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Channel Layer ◽

Gate Structure ◽

Bottom Gate

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High-performance vertically stacked bottom-gate and top-gate polycrystalline silicon thin-film transistors for three-dimensional integrated circuits

Solid-State Electronics ◽

10.1016/j.sse.2012.05.016 ◽

2012 ◽

Vol 77 ◽

pp. 26-30 ◽

Cited By ~ 3

Author(s):

I-Che Lee ◽

Tsung-Che Tsai ◽

Chun-Chien Tsai ◽

Po-Yu Yang ◽

Chao-Lung Wang ◽

...

Keyword(s):

Thin Film ◽

Integrated Circuits ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Three Dimensional ◽

Silicon Thin Film ◽

Bottom Gate

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High-Performance Recessed-Channel Germanium Thin-Film Transistors via Excimer Laser Crystallization

IEEE Electron Device Letters ◽

10.1109/led.2018.2791506 ◽

2018 ◽

Vol 39 (3) ◽

pp. 367-370 ◽

Cited By ~ 4

Author(s):

Chan-Yu Liao ◽

Shih-Hung Chen ◽

Wen-Hsien Huang ◽

Chang-Hong Shen ◽

Jia-Min Shieh ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

High Performance ◽

Laser Crystallization ◽

Excimer Laser Crystallization ◽

Recessed Channel

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High-Performance Low Temperature Poly-Silicon Thin Film Transistors Fabricated by Excimer Laser Irradiation with Bottom-Gate Structure

ECS Meeting Abstracts ◽

10.1149/ma2006-02/33/1587 ◽

2006 ◽

Keyword(s):

Thin Film ◽

Low Temperature ◽

Laser Irradiation ◽

Excimer Laser ◽

Thin Film Transistors ◽

High Performance ◽

Silicon Thin Film ◽

Gate Structure ◽

Excimer Laser Irradiation ◽

Bottom Gate

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High-Performance Self-Aligned Bottom-Gate Low-Temperature Poly-Silicon Thin-Film Transistors With Excimer Laser Crystallization

IEEE Electron Device Letters ◽

10.1109/led.2007.899326 ◽

2007 ◽

Vol 28 (7) ◽

pp. 599-602 ◽

Cited By ~ 24

Author(s):

Chun-Chien Tsai ◽

Hsu-Hsin Chen ◽

Bo-Ting Chen ◽

Huang-Chung Cheng

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

High Performance ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Poly Silicon ◽

Excimer Laser Crystallization ◽

Bottom Gate

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SiO2formation by thermal evaporation of SiO in oxygen atmosphere used to fabrication of high performance polycrystalline silicon thin film transistors

Applied Physics Letters ◽

10.1063/1.110956 ◽

1994 ◽

Vol 64 (8) ◽

pp. 1018-1020 ◽

Cited By ~ 32

Author(s):

T. Sameshima ◽

A. Kohno ◽

M. Sekiya ◽

M. Hara ◽

N. Sano

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Thermal Evaporation ◽

Oxygen Atmosphere ◽

Silicon Thin Film

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