Improved Nanogap Servo System Using an Error-Based Disturbance Observer for High-Speed in Solid Immersion Lens-Based Plasmonic Lithography
2013 ◽
Vol 52
(9S2)
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pp. 09LG02
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2009 ◽
Vol 129
(3)
◽
pp. 235-242
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2009 ◽
Vol 129
(12)
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pp. 2194-2200
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Keyword(s):
2002 ◽
Vol 68
(668)
◽
pp. 1191-1197
2018 ◽
Vol 23
(2)
◽
pp. 769-780
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Keyword(s):
2012 ◽
Vol 36
(1)
◽
pp. 83-96
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1986 ◽
Vol 118
◽
pp. 121-122