Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering

1998 ◽  
Vol 98 (1-3) ◽  
pp. 1304-1314 ◽  
Author(s):  
S. Jäger ◽  
B. Szyszka ◽  
J. Szczyrbowski ◽  
G. Bräuer
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Transparent Conductive Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Conductive Oxide

Structure and optical parameters of Eu doped tellurium oxide thin films prepared by reactive magnetron sputtering method

2019 ◽  
Vol 691 ◽  
pp. 137592 ◽  
Author(s):  
Marcin Łapiński ◽  
Michalina Walas ◽  
Anna Gapska ◽  
Dorota Kulik ◽  
Aneta Szmytke ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Optical Parameters ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Tellurium Oxide
Sign in / Sign up

Export Citation Format

Share Document