Experimental evidence of trap level modulation in silicon nitride thin films by hydrogen annealing
2018 ◽
Vol 57
(6S3)
◽
pp. 06KB04
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2021 ◽
Vol 12
◽
pp. 1623-1637
1991 ◽
Vol 48-49
◽
pp. 409-413
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2001 ◽
Vol 40
(Part 1, No. 6B)
◽
pp. 4292-4298
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Keyword(s):
1968 ◽
Vol 115
(5)
◽
pp. 525
◽
1993 ◽
pp. 421-426
Keyword(s):