Propose of New Mixture Target for Low Temperature and High Rate Deposition of PZT Thin Films by Reactive Sputtering

1997 ◽  
Author(s):  
Tomonobu HATA ◽  
WeiXiao ZHANG ◽  
Shinya KAWAGOE ◽  
Kimihiro SASAKI
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Reactive Sputtering ◽  
High Rate ◽  
Pzt Thin Films

Low Temperature and High Rate Deposition of Ferrite Thin Films by Reactive Sputtering Method Using Electron Cyclotron Eesonance

Shinku ◽  
2006 ◽  
Vol 49 (7) ◽  
pp. 424-429
Author(s):  
Terumitsu TANAKA ◽  
Kazunori OSHIRO ◽  
Hirotaka FUJIMORI ◽  
Hiroki KURISU ◽  
Yoshihiro SHIMOSATO ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Reactive Sputtering ◽  
Electron Cyclotron ◽  
High Rate ◽  
Ferrite Thin Films

Preparation of pzt thin films on Pt/Ti/SiO2 and Pt/SiO2 Substrates by ECR Plasma Enhanced DC Magnetron Multi-target Reactive Sputtering

1996 ◽  
Vol 441 ◽  
Author(s):  
Sung-Tae Kim ◽  
Hyun-Ho Kim ◽  
Moon-Yong Lee ◽  
Won-Jong Lee
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Electron Cyclotron Resonance ◽  
Perovskite Phase ◽  
Early Stage ◽  
Reactive Sputtering ◽  
Deposition Process ◽  
Pzt Thin Films ◽  
Si Substrates ◽  
Ecr Plasma

AbstractPerovskite-phase lead zirconate titanate (PZT) thin films were fabricated at 4751C by the electron cyclotron resonance (ECR) plasma enhanced DC magnetron multi-target reactive sputtering method on Pt/Ti/SiO2/Si and Pt/SiO2/Si substrates. Stoichiometric perovskite PZT films were readily obtained on Pt/Ti/SiO2/Si substrates because Ti atoms which were out-diffused to the Pt surface facilitated Pb incorporation by forming lead titanate at the early stage of deposition process. Activation of oxygen by ECR plasma facilitated the oxidation reaction and Pb incorporation into the film. Thus perovskite-phase PZT can be obtained on the Pt/SiO2/Si substrate.

Low-temperature preparation of highly (111) oriented PZT thin films by a modified sol–gel technique

2000 ◽  
Vol 208 (1-4) ◽  
pp. 541-545 ◽  
Author(s):  
X.J Meng ◽  
J.G Cheng ◽  
B Li ◽  
S.L Guo ◽  
H.J Ye ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Sol Gel ◽  
Pzt Thin Films ◽  
Low Temperature Preparation ◽  
Gel Technique ◽  
Temperature Preparation

scholarly journals Excess lead in the perovskite lattice of pzt thin films made by in-situ reactive sputtering

2001 ◽  
Vol 36 (1-4) ◽  
pp. 53-62 ◽  
Author(s):  
Paul Muralt ◽  
Stephane Hiboux ◽  
Claude Mueller ◽  
Thomas Maeder ◽  
Laurent Sagalowicz ◽  
...  
Keyword(s):  
Thin Films ◽  
Reactive Sputtering ◽  
Pzt Thin Films ◽  
Excess Lead ◽  
Perovskite Lattice

scholarly journals Novel strategy for low-temperature, high-rate growth of dense, hard, and stress-free refractory ceramic thin films

2014 ◽  
Vol 32 (4) ◽  
pp. 041515 ◽  
Author(s):  
Grzegorz Greczynski ◽  
Jun Lu ◽  
Stephan Bolz ◽  
Werner Kölker ◽  
Christoph Schiffers ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
High Rate ◽  
Ceramic Thin Films ◽  
Refractory Ceramic ◽  
Novel Strategy
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