High Quality Silicon Oxide Film Formed by Diffusion Region PECVD and Oxygen Radical Treatment using Microwave-Excited High-Density Plasma

2002 ◽  
Author(s):  
Hiroaki Tanaka ◽  
Zhong Chuanjie ◽  
Masaki Hirayama ◽  
Akinobu Teramoto ◽  
Shigetoshi Sugawa ◽  
...  
Keyword(s):  
Oxide Film ◽  
Silicon Oxide ◽  
Oxygen Radical ◽  
High Density ◽  
Diffusion Region ◽  
High Quality ◽  
Silicon Oxide Film ◽  
Radical Treatment ◽  
Density Plasma

High quality hydrogenated amorphous silicon oxide film and its application in thin film silicon solar cells

2011 ◽  
Vol 11 (1) ◽  
pp. S17-S20 ◽  
Author(s):  
Jaran Sritharathikhun ◽  
Apichan Moollakorn ◽  
Songkiate Kittisontirak ◽  
Amornrat Limmanee ◽  
Kobsak Sriprapha
Keyword(s):  
Thin Film ◽  
Oxide Film ◽  
Amorphous Silicon ◽  
Silicon Oxide ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Solar Cells ◽  
High Quality ◽  
Silicon Oxide Film ◽  
Amorphous Silicon Oxide ◽  
Hydrogenated Amorphous

Adhesion of a thin silicon oxide film on a polycarbonate substrate

1993 ◽  
Vol 64-65 ◽  
pp. 849-856 ◽  
Author(s):  
S. Vallon ◽  
B. Drévillon ◽  
C. Sénémaud ◽  
A. Gheorghiu ◽  
V. Yakovlev
Keyword(s):  
Oxide Film ◽  
Silicon Oxide ◽  
Silicon Oxide Film ◽  
Thin Silicon ◽  
Polycarbonate Substrate

Photoluminescence of a silicon oxide film formed by anodization in the electropolishing region in HF solution

1995 ◽  
Vol 7 (14) ◽  
pp. 2901-2907 ◽  
Author(s):  
Xiangyang Ma ◽  
Lideng Chen ◽  
Zhenguo Ji ◽  
Hongnian Yao ◽  
Duanlin Que
Keyword(s):  
Oxide Film ◽  
Silicon Oxide ◽  
Silicon Oxide Film

Microstructure and optical characteristics of nanocrystalline silicon oxide film in phase transformation zone

2017 ◽  
Vol 25 (4) ◽  
pp. 850-856
Author(s):  
李晓苇 LI Xiao-wei ◽  
李云 LI Yun ◽  
郑燕 ZHENG Yan ◽  
高东泽 GAO Dong-ze ◽  
于威 YU Wei
Keyword(s):  
Phase Transformation ◽  
Oxide Film ◽  
Silicon Oxide ◽  
Nanocrystalline Silicon ◽  
Optical Characteristics ◽  
Transformation Zone ◽  
Silicon Oxide Film
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