Recent Trends on a Precision Dimensional Sensor Using Optical Modulation Techniques

2021 ◽  
Vol 38 (12) ◽  
pp. 889-896
Author(s):  
Yoon-Soo Jang ◽  
Jungjae Park ◽  
Jonghan Jin
Keyword(s):  
Optical Modulation ◽  
Modulation Techniques ◽  
Recent Trends

scholarly journals Characterisation of Semiconductors by Differential Reflectance Spectroscopy

1991 ◽  
Vol 44 (6) ◽  
pp. 705 ◽  
Author(s):  
C Shwe ◽  
M Gal
Keyword(s):  
Ion Implantation ◽  
Alloy Composition ◽  
Surface Damage ◽  
Optical Modulation ◽  
Semiconductor Surface ◽  
External Modulation ◽  
Bulk Semiconductors ◽  
Modulation Techniques ◽  
Surface Electric Field ◽  
Thickness Variations

We have used differential reflectance (DR) spectroscopy, an optical modulation technique which does not require external modulation, to characterise bulk semiconductors and semiconductor microstructures. DR signals are the result of inhomogeneities on or below the semiconductor surface. They may be intrinsic, such as alloy fluctuations or layer thickness variations, or externally induced, such as ion implantation, hydrogenation, etc. The DR spectra are similar to spectra measured by other modulation techniques, exhibiting sharp derivative�like lineshapes at photon energies corresponding to the critical point transitions. The magnitude of the DR signal, its position and linewidth can all be used to identify and characterise fluctuations in semiconductor parameters, for example surface electric field, alloy composition, layer thicknesses, etc. It can also be used to monitor surface damage caused by different techniques, such as hydrogenation, reactive ion etching and ion implantation.

Optical coherence tomography velocimetry of colloidal suspensions

Soft Matter ◽  
2014 ◽  
Vol 10 (41) ◽  
pp. 8210-8215 ◽  
Author(s):  
A. V. Malm ◽  
A. W. Harrison ◽  
T. A. Waigh
Keyword(s):  
Optical Coherence Tomography ◽  
Shear Rate ◽  
Colloidal Suspensions ◽  
Optical Modulation ◽  
Optical Coherence ◽  
Fluid Systems ◽  
Modulation Techniques ◽  
Increased Sensitivity ◽  
Complex Fluid ◽  
Low Shear

Optical coherence tomography velocimetry combined with a rheometer and optical modulation techniques provides increased sensitivity to the low shear rate motion of complex fluid systems.

Optical modulation techniques for underwater detection, ranging and imaging

2011 ◽  
Author(s):  
Linda Mullen ◽  
Brandon Cochenour ◽  
Alan Laux ◽  
Derek Alley
Keyword(s):  
Optical Modulation ◽  
Modulation Techniques

Phase-Noise Analysis of Optically Generated Millimeter-Wave Signals With External Optical Modulation Techniques

2006 ◽  
Vol 24 (12) ◽  
pp. 4861-4875 ◽  
Author(s):  
Guohua Qi ◽  
Jianping Yao ◽  
Joe Seregelyi ◽  
Stphane Paquet ◽  
Claude Belisle ◽  
...  
Keyword(s):  
Phase Noise ◽  
Millimeter Wave ◽  
Noise Analysis ◽  
Optical Modulation ◽  
Modulation Techniques

Optical modulation techniques for length sensing and control of optical cavities

2007 ◽  
Vol 46 (31) ◽  
pp. 7739 ◽  
Author(s):  
B. W. Barr ◽  
S. H. Huttner ◽  
J. R. Taylor ◽  
B. Sorazu ◽  
M. V. Plissi ◽  
...  
Keyword(s):  
Optical Modulation ◽  
Optical Cavities ◽  
Modulation Techniques ◽  
And Control

Optical modulation techniques for analog signal processing and CMOS compatible electro-optic modulation

2008 ◽  
Author(s):  
Douglas M. Gill ◽  
Mahmoud Rasras ◽  
Kun-Yii Tu ◽  
Young-Kai Chen ◽  
Alice E. White ◽  
...  
Keyword(s):  
Signal Processing ◽  
Analog Signal Processing ◽  
Analog Signal ◽  
Optical Modulation ◽  
Electro Optic ◽  
Modulation Techniques ◽  
Cmos Compatible
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