Interfacial adhesion energies of Ru–Mn direct plateable diffusion barriers prepared by atomic layer deposition for advanced Cu interconnects

2021 ◽  
Author(s):  
Kirak Son ◽  
Youn-Hye Kim ◽  
Soo-Hyun Kim ◽  
Young-Bae Park
Keyword(s):  
Atomic Layer Deposition ◽  
Interfacial Adhesion ◽  
Atomic Layer ◽  
Diffusion Barriers ◽  
Cu Interconnects ◽  
Layer Deposition

Atomic Layer Deposition (ALD) of Ultra-Thin Diffusion Barriers on ZnSe Microparticles for Phase Stability in Chalcogenide Glasses for Mid-Infrared Optics

2021 ◽  
Vol MA2021-02 (29) ◽  
pp. 873-873
Author(s):  
Jaynlynn Sosa ◽  
Matthieu Chazot ◽  
Corbin Feit ◽  
Alexandros Kostogiannes ◽  
Myungkoo Kang ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Phase Stability ◽  
Chalcogenide Glasses ◽  
Atomic Layer ◽  
Diffusion Barriers ◽  
Mid Infrared ◽  
Infrared Optics ◽  
Layer Deposition

Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers

2006 ◽  
Vol 89 (3) ◽  
pp. 031915 ◽  
Author(s):  
P. F. Carcia ◽  
R. S. McLean ◽  
M. H. Reilly ◽  
M. D. Groner ◽  
S. M. George
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Gas Diffusion ◽  
Diffusion Barriers ◽  
Layer Deposition

Atomic Layer Deposition of Ru for Replacing Cu-Interconnects

2021 ◽  
Author(s):  
Yohei Kotsugi ◽  
Seung-Min Han ◽  
Youn-Hye Kim ◽  
Taehoon Cheon ◽  
Dip K. Nandi ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Cu Interconnects ◽  
Layer Deposition
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