Aluminum nitride as a masking material for the plasma etching of silicon carbide structures

2010 ◽  
Author(s):  
Debbie G. Senesky ◽  
Albert P. Pisano
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Plasma Etching

Synthesis of Aluminum Nitride-Silicon Carbide Solid Solutions by Combustion Nitridation

2004 ◽  
Vol 83 (5) ◽  
pp. 1108-1112 ◽  
Author(s):  
Manshi Ohyanagi ◽  
Kenshiro Shirai ◽  
Nadejda Balandina ◽  
Masaaki Hisa ◽  
Zuhair A. Munir
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Solid Solutions

Crystal quality and growth evolution of aluminum nitride on silicon carbide

2006 ◽  
Vol 203 (7) ◽  
pp. 1708-1711 ◽  
Author(s):  
Craig G. Moe ◽  
Yuan Wu ◽  
Stacia Keller ◽  
James S. Speck ◽  
Steven P. DenBaars ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Crystal Quality ◽  
Growth Evolution

Seeded PVT Growth of Aluminum Nitride on Silicon Carbide

2003 ◽  
Vol 433-436 ◽  
pp. 983-986 ◽  
Author(s):  
Boris M. Epelbaum ◽  
Matthias Bickermann ◽  
Albrecht Winnacker
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride

Influence of Orientation of a Silicon Substrate with a Buffer Silicon Carbide Layer on Dielectric and Polar Properties of Aluminum Nitride Films

2019 ◽  
Vol 61 (12) ◽  
pp. 2386-2391 ◽  
Author(s):  
O. N. Sergeeva ◽  
A. V. Solnyshkin ◽  
D. A. Kiselev ◽  
T. S. Il’ina ◽  
S. A. Kukushkin ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Silicon Substrate ◽  
Carbide Layer
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