A Highly Sensitive Tactile Sensor Using a Pyramid-Plug Structure for Detecting Pressure, Shear Force, and Torsion

2018 ◽  
Vol 4 (3) ◽  
pp. 1800284 ◽  
Author(s):  
Daehwan Choi ◽  
Sukjin Jang ◽  
Joo Sung Kim ◽  
Hyung-Jun Kim ◽  
Do Hwan Kim ◽  
...  
Author(s):  
Yichao Yang ◽  
Zhili Hao

This paper reports on a microfluidic-based tactile sensor capable of detecting forces along two directions and torque about one direction. The 3-Degree-Of-Freedom (3-DOF) force/torque sensor encompasses a symmetric three-dimensional (3D) microstructure embedded with two sets of electrolyte-enabled distributed resistive transducers underneath. The 3D microstructure is built into a rectangular block with a loading-bump on its top and two microchannels at its bottom. Together with electrode pairs distributed along the microchannel length, electrolyte in each microchannel functions as a set of three resistive transducers. While a normal force results in a resistance increase in the two sets of transducers, a shear force causes opposite resistance changes in the two sets of transducers. Conversely, a torque leads to the opposite resistance changes in the two side transducers in each set. Soft lithography and CNC molding are combined to fabricate a prototype tactile sensor. The experimental results validate the feasibility of using this microfluidic-based tactile sensor for 3-DOF force/torque detection.


2014 ◽  
Author(s):  
Seonggi Kim ◽  
Baek-chul Kim ◽  
Jiyeon Jung ◽  
Ja Choon Koo ◽  
Hyouk Ryeol Choi ◽  
...  

2010 ◽  
Vol 19 (04) ◽  
pp. 589-594 ◽  
Author(s):  
YUSUKE KAJIHARA ◽  
KEISHI KOSAKA ◽  
SUSUMU KOMIYAMA

We have developed a scattering-type scanning near-field optical microscope in long-wavelength infrared region (wavelength: λ ~ 14.5 μm) with a highly sensitive detector, named charge sensitive infrared phototransistor. A tungsten near-field probe was fabricated via electrochemical etching and the sample-probe distance was precisely controlled in shear-force mode. By vertically modulating the probe independently of lateral oscillation for shear-force mode, we successfully detected thermal evanescent waves from a 3 μm-pitch Au/GaAs grating without any external illumination. The spatial resolution was experimentally estimated to be better than 150 nm (λ/100) and the signal-to-noise ratio was around 4 with an averaging time of 300 ms. The strong near-field signal from Au was suggested to be ascribed to thermally excited surface plasmons generating evanescent waves at the surface.


2018 ◽  
Vol 4 (4) ◽  
pp. 1700586 ◽  
Author(s):  
Yongbiao Wan ◽  
Zhiguang Qiu ◽  
Ying Hong ◽  
Yan Wang ◽  
Jianming Zhang ◽  
...  

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