ChemInform Abstract: Gas Phase Photoproduction of Diatomic Metal Nitrides During Metal Nitride Laser Chemical Vapor Deposition.

ChemInform ◽  
2010 ◽  
Vol 30 (28) ◽  
pp. no-no
Author(s):  
Jinwoo Cheon ◽  
Matthew Guile ◽  
Peter Muraoka ◽  
Jeffrey I. Zink
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Metal Nitrides ◽  
Laser Chemical Vapor Deposition ◽  
Metal Nitride ◽  
Nitride Laser

Roles of Gas Phase and Surface Photolysis in Laser Chemical Vapor Deposition from Fe(CO)5

1989 ◽  
Vol 158 ◽  
Author(s):  
Xin Xu ◽  
J.I. Steinfeld
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Photolysis ◽  
Chemical State ◽  
Xps Analysis ◽  
Laser Chemical Vapor Deposition ◽  
Iron Films

ABSTRACTThe chemical state of the carbon and oxygen incorporated in iron films formed by laser photolysis of Fe(CO)5 has been examined by profiling XPS analysis. A significant portion of the codeposited CO is photodissociated at the growing surface.

scholarly journals Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

2017 ◽  
Vol 121 (47) ◽  
pp. 26465-26471 ◽  
Author(s):  
Mewlude Imam ◽  
Laurent Souqui ◽  
Jan Herritsch ◽  
Andreas Stegmüller ◽  
Carina Höglund ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thermal Chemical Vapor Deposition ◽  
Gas Phase Chemistry ◽  
Phase Chemistry

scholarly journals Gas-phase aluminium acetylacetonate decomposition: Revision of the current mechanism by VUV synchrotron radiation

2021 ◽  
Author(s):  
Sebastian Grimm ◽  
Seung-Jin Baik ◽  
Patrick Hemberger ◽  
Andras Bodi ◽  
Andreas Kempf ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Synchrotron Radiation ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Aluminium Oxide ◽  
Chemical Vapor ◽  
Phase Decomposition ◽  
Common Precursor ◽  
Current Mechanism

Although aluminium acetylacetonate, Al(C5H7O2)3, is a common precursor for chemical vapor deposition (CVD) of aluminium oxide, its gas phase decomposition is not very well investigated. Here, we studied its thermal...

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