Gas-phase aluminium acetylacetonate decomposition: Revision of the current mechanism by VUV synchrotron radiation
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Although aluminium acetylacetonate, Al(C5H7O2)3, is a common precursor for chemical vapor deposition (CVD) of aluminium oxide, its gas phase decomposition is not very well investigated. Here, we studied its thermal...
2010 ◽
Vol 31
(8)
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pp. 2416-2418
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2011 ◽
Vol 115
(37)
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pp. 10290-10298
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2017 ◽
Vol 121
(47)
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pp. 26465-26471
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1999 ◽
Vol 61-62
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pp. 176-178
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2018 ◽