CO2 Laser Chemical Vapor Deposition of Amorphous Silicon: Gas Phase Processes and Thin Film Properties
1991 ◽
Vol 95
(11)
◽
pp. 1414-1416
◽
1994 ◽
Vol 12
(2)
◽
pp. 484-493
◽
2009 ◽
Vol 54
(1)
◽
pp. 194-199
◽
2003 ◽
Vol 125
(7-8)
◽
pp. 387-390
◽
2011 ◽
Vol 206
(6)
◽
pp. 1503-1506
◽
1997 ◽
Vol 36
(Part 2, No. 2A)
◽
pp. L150-L153
◽
2001 ◽
Vol 395
(1-2)
◽
pp. 330-334
◽