Growth Mechanism in Atomic Layer Epitaxy (II). A Model of the Growth Process of CdTe on CdTe (111) Substrates

1986 ◽  
Vol 21 (8) ◽  
pp. 969-974 ◽  
Author(s):  
M. A. Herman ◽  
O. Jylhä ◽  
M. Pessa
Keyword(s):  
Growth Mechanism ◽  
Growth Process ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy

In SituGravimetric Monitoring of the GaAs Growth Process in Atomic Layer Epitaxy

1991 ◽  
Vol 30 (Part 2, No. 11A) ◽  
pp. L1847-L1849 ◽  
Author(s):  
Akinori Koukitu ◽  
Hitoshi Ikeda ◽  
Hiroshi Yasutake ◽  
Hisashi Seki
Keyword(s):  
Growth Process ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy

Novel approach for Growth Mechanism of Atomic Layer Epitaxy of GaAs and AlAs

2019 ◽  
Author(s):  
N. Ohtsuka ◽  
M. Oda ◽  
T. Eshita ◽  
I. Tanaka ◽  
C. Itoh
Keyword(s):  
Growth Mechanism ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Novel Approach

Growth process of Ge on Si(100)-(2×1)in atomic-layer epitaxy fromGe2H6

1997 ◽  
Vol 56 (8) ◽  
pp. 4878-4886 ◽  
Author(s):  
Kuang-Hsin Huang ◽  
Tsai-Shian Ku ◽  
Deng-Sung Lin
Keyword(s):  
Growth Process ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy

scholarly journals Elucidating the growth mechanism of ZnO films by atomic layer deposition with oxygen gas via isotopic tracking

2021 ◽  
Vol 9 (12) ◽  
pp. 4307-4315
Author(s):  
Tai Nguyen ◽  
Nathalie Valle ◽  
Jérôme Guillot ◽  
Jérôme Bour ◽  
Noureddine Adjeroud ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Growth Mechanism ◽  
Growth Process ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Zno Films ◽  
Layer Deposition ◽  
Oxygen Gas

The growth process of zinc oxide (ZnO) thin films by atomic layer deposition (ALD) accompanied by the presence of oxygen gas pulsing is investigated by means of the isotopic tracking of oxygen 18O from the water precursor and oxygen 16O from the gas.

Atomic layer epitaxy of AlAs: Growth mechanism

1994 ◽  
Vol 82-83 ◽  
pp. 233-238 ◽  
Author(s):  
M. Ozeki ◽  
N. Ohtsuka
Keyword(s):  
Growth Mechanism ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy
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