Growth mechanism in atomic layer epitaxy (III) reevaporation of Cd and Te from CdTe (111) surfaces and thick elemental deposits monitored by quadrupole-mass spectrometry

1988 ◽  
Vol 23 (3) ◽  
pp. 307-317 ◽  
Author(s):  
M. A. Herman ◽  
P. Juza ◽  
W. Faschinger ◽  
H. Sitter
Keyword(s):  
Mass Spectrometry ◽  
Growth Mechanism ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Quadrupole Mass ◽  
Quadrupole Mass Spectrometry

In Situ Quadrupole Mass Spectrometry Study of Atomic-Layer Deposition of ZrO2Using Cp2Zr(CH3)2and Water

Langmuir ◽  
2005 ◽  
Vol 21 (16) ◽  
pp. 7321-7325 ◽  
Author(s):  
Jaakko Niinistö ◽  
Antti Rahtu ◽  
Matti Putkonen ◽  
Mikko Ritala ◽  
Markku Leskelä ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Quadrupole Mass ◽  
Quadrupole Mass Spectrometry ◽  
Layer Deposition ◽  
Mass Spectrometry Study
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