The current understanding of epitaxial CVD silicon doping in the light of modelling and theory development (III). The law of epitaxial layer doping and its limitation
1987 ◽
Vol 22
(6)
◽
pp. 767-776
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1987 ◽
Vol 22
(5)
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pp. 669-676
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1987 ◽
Vol 22
(4)
◽
pp. 487-494
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1988 ◽
Vol 23
(3)
◽
pp. 327-335
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Keyword(s):
2021 ◽
2016 ◽
Vol 98
(903)
◽
pp. 995-1017
1987 ◽
Vol 22
(8)
◽
pp. 989-997
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Keyword(s):
1989 ◽
Vol 24
(3)
◽
pp. 291-298
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