High performance a-IGZO thin-film transistors with mf-PVD SiO2
as an etch-stop-layer
2014 ◽
Vol 22
(1)
◽
pp. 23-28
◽
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Keyword(s):
2013 ◽
Vol 52
(10R)
◽
pp. 100209
◽
2016 ◽
Vol 63
(7)
◽
pp. 2785-2789
◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 130
(2)
◽
pp. 161-166
Keyword(s):
Keyword(s):
Keyword(s):