Mechanical properties of atomic layer deposition (ALD) TiO2layers on stainless steel substrates

2016 ◽  
Vol 47 (5-6) ◽  
pp. 512-520 ◽  
Author(s):  
M. Basiaga ◽  
M. Staszuk ◽  
W. Walke ◽  
Z. Opilski
Keyword(s):  
Mechanical Properties ◽  
Stainless Steel ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Steel Substrates

Photocatalytic effect of thermal atomic layer deposition of TiO2 on stainless steel

2011 ◽  
Vol 104 (1-2) ◽  
pp. 6-11 ◽  
Author(s):  
Hyemin Kang ◽  
Chang-Soo Lee ◽  
Do-Young Kim ◽  
Jungwon Kim ◽  
Wonyong Choi ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Photocatalytic Effect ◽  
Layer Deposition

Atomic Layer Deposition of Lithium-Silicon-Tin Oxide Nanofilms for High Performance Thin Film Batteries Anodes

2020 ◽  
Vol 299 ◽  
pp. 1058-1063
Author(s):  
Denis Nazarov ◽  
Ilya Mitrofanov ◽  
Maxim Yu. Maximov
Keyword(s):  
Thin Film ◽  
Stainless Steel ◽  
Atomic Layer Deposition ◽  
Tin Oxide ◽  
Oxygen Plasma ◽  
Atomic Layer ◽  
Cycling Performance ◽  
Spectral Ellipsometry ◽  
X Ray ◽  
Layer Deposition

Tin oxide is the most promising material for thin film anodes of Li-ion batteries due to its cycling performance and high theoretical capacity. It is assumed that lithium-tin oxide can demonstrate even higher performance. Lithium-silicon-tin oxide nanofilms were prepared by atomic layer deposition (ALD), using the lithium bis (trimethylsilyl) amide (LiHMDS), tetraethyltin (TET) as a metal containing reagents and ozone or water or oxygen plasma as counter-reactants. Monocrystalline silicon (100) and stainless steel (316SS) were used as supports. The thicknesses of the nanofilms were measured by spectral ellipsometry (SE) and scanning electron microscopy (SEM). It was found that oxygen plasma is the most optimal ALD counter-reactant. The composition and structure were studied by Time-of-Flight Secondary Ion Mass Spectroscopy (ToF-SIMS), X-ray Photoelectron Spectroscopy (XPS) and X-ray diffraction (XRD). The nanofilms contain silicon as impurity, whose source is the ALD precursor (LiHMDS). The nanofilms deposited on stainless steel have shown the high Coulombic efficiency (99.1-99.8%) and cycling performance at a relatively high voltage (0.01 to 2.0V).

Multilayer Al2O3/TiO2 Atomic Layer Deposition coatings for the corrosion protection of stainless steel

2012 ◽  
Vol 522 ◽  
pp. 283-288 ◽  
Author(s):  
E. Marin ◽  
L. Guzman ◽  
A. Lanzutti ◽  
W. Ensinger ◽  
L. Fedrizzi
Keyword(s):  
Stainless Steel ◽  
Atomic Layer Deposition ◽  
Corrosion Protection ◽  
Atomic Layer ◽  
Layer Deposition

Tuning the mechanical properties of vertical graphene sheets through atomic layer deposition

2016 ◽  
Vol 27 (15) ◽  
pp. 155701 ◽  
Author(s):  
Keivan Davami ◽  
Yijie Jiang ◽  
John Cortes ◽  
Chen Lin ◽  
Mehrdad Shaygan ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Graphene Sheets ◽  
Layer Deposition
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