scholarly journals Optical and mechanical properties of nanolaminates of zirconium and hafnium oxides grown by atomic layer deposition

2020 ◽  
Vol 38 (2) ◽  
pp. 022406
Author(s):  
Taivo Jõgiaas ◽  
Mikk Kull ◽  
Helina Seemen ◽  
Peeter Ritslaid ◽  
Kaupo Kukli ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Optical And Mechanical Properties

Tuning the mechanical properties of vertical graphene sheets through atomic layer deposition

2016 ◽  
Vol 27 (15) ◽  
pp. 155701 ◽  
Author(s):  
Keivan Davami ◽  
Yijie Jiang ◽  
John Cortes ◽  
Chen Lin ◽  
Mehrdad Shaygan ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Graphene Sheets ◽  
Layer Deposition

scholarly journals Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

2018 ◽  
Vol 36 (5) ◽  
pp. 051508 ◽  
Author(s):  
Perttu Sippola ◽  
Alexander Pyymaki Perros ◽  
Oili M. E. Ylivaara ◽  
Helena Ronkainen ◽  
Jaakko Julin ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Atomic Layer Deposition ◽  
Aluminum Nitride ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Magnetron Sputter

Nanoporous gyroid metal oxides with controlled thickness and composition by atomic layer deposition from block copolymer templates

2016 ◽  
Vol 4 (4) ◽  
pp. 840-849 ◽  
Author(s):  
Wei-Chun Ma ◽  
Wei-Shiang Huang ◽  
Ching-Shun Ku ◽  
Rong-Ming Ho
Keyword(s):  
Mechanical Properties ◽  
Block Copolymer ◽  
Atomic Layer Deposition ◽  
Specific Surface ◽  
Metal Oxides ◽  
Atomic Layer ◽  
High Porosity ◽  
Large Specific Surface Area ◽  
Layer Deposition ◽  
Superior Mechanical Properties

Nanoporous gyroid metal oxides were fabricated with controlled tube thickness and composition by templated atomic layer deposition giving high porosity and large specific surface area as well as superior mechanical properties.

Mechanical properties of atomic layer deposition-reinforced nanoparticle thin films

Nanoscale ◽  
2012 ◽  
Vol 4 (20) ◽  
pp. 6543 ◽  
Author(s):  
Lei Zhang ◽  
Jacob H. Prosser ◽  
Gang Feng ◽  
Daeyeon Lee
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Mechanical properties of boron nitride thin films prepared by atomic layer deposition

CrystEngComm ◽  
2017 ◽  
Vol 19 (41) ◽  
pp. 6089-6094 ◽  
Author(s):  
Matthieu Weber ◽  
Emerson Coy ◽  
Igor Iatsunskyi ◽  
Luis Yate ◽  
Philippe Miele ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Boron Nitride ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Heat Treatments ◽  
Layer Deposition

Unravelling the relation between heat treatments and resulting mechanical properties of boron nitride thin films prepared by ALD.

Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition

2015 ◽  
Vol 282 ◽  
pp. 36-42 ◽  
Author(s):  
Taivo Jõgiaas ◽  
Roberts Zabels ◽  
Aile Tamm ◽  
Maido Merisalu ◽  
Irina Hussainova ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition
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