Low-temperature deposition of nanocrystalline diamond films on silicon nitride substrates using distributed antenna array PECVD system

physica status solidi (a) ◽

10.1002/pssa.201600221 ◽

2016 ◽

Vol 213 (10) ◽

pp. 2575-2581 ◽

Author(s):

Benoît Baudrillart ◽

Fabien Bénédic ◽

Amel S. Melouani ◽

Filipe J. Oliveira ◽

Rui F. Silva ◽

...

Keyword(s):

Silicon Nitride ◽

Low Temperature ◽

Antenna Array ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Low Temperature Deposition ◽

Nanocrystalline Diamond Films ◽

Distributed Antenna ◽

Temperature Deposition

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Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

physica status solidi (a) ◽

10.1002/pssa.201800251 ◽

2018 ◽

Vol 215 (22) ◽

pp. 1800251 ◽

Author(s):

Damia Dekkar ◽

Fabien Bénédic ◽

Cécile Floer ◽

Sami Hage-Ali ◽

Ovidiu Brinza ◽

...

Keyword(s):

Low Temperature ◽

Acoustic Wave ◽

Diamond Films ◽

Layered Structures ◽

Nanocrystalline Diamond ◽

Low Temperature Deposition ◽

Nanocrystalline Diamond Films ◽

Temperature Deposition ◽

Acoustic Wave Devices

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Investigation of a distributed antenna array microwave system for the three-dimensional low-temperature growth of nanocrystalline diamond films

Diamond and Related Materials ◽

10.1016/j.diamond.2019.02.016 ◽

2019 ◽

Vol 94 ◽

pp. 28-36 ◽

Author(s):

D. Dekkar ◽

F. Bénédic ◽

C. Falentin-Daudré ◽

O. Brinza ◽

R. Issaoui ◽

...

Keyword(s):

Low Temperature ◽

Antenna Array ◽

Three Dimensional ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Temperature Growth ◽

Low Temperature Growth ◽

Nanocrystalline Diamond Films ◽

Distributed Antenna ◽

Microwave System

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Low temperature and large area deposition of nanocrystalline diamond films with distributed antenna array microwave-plasma reactor

Diamond and Related Materials ◽

10.1016/j.diamond.2014.05.004 ◽

2014 ◽

Vol 47 ◽

pp. 58-65 ◽

Author(s):

H.-A. Mehedi ◽

J. Achard ◽

D. Rats ◽

O. Brinza ◽

A. Tallaire ◽

...

Keyword(s):

Low Temperature ◽

Antenna Array ◽

Microwave Plasma ◽

Plasma Reactor ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

Distributed Antenna ◽

Area Deposition

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Growth processes of nanocrystalline diamond films in microwave cavity and distributed antenna array systems: A comparative study

Diamond and Related Materials ◽

10.1016/j.diamond.2016.11.018 ◽

2017 ◽

Vol 71 ◽

pp. 53-62 ◽

Author(s):

B. Baudrillart ◽

A.S.C. Nave ◽

S. Hamann ◽

F. Bénédic ◽

G. Lombardi ◽

...

Keyword(s):

Comparative Study ◽

Antenna Array ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Microwave Cavity ◽

Growth Processes ◽

Nanocrystalline Diamond Films ◽

Distributed Antenna

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Microstructure and biological evaluation of nanocrystalline diamond films deposited on titanium substrates using distributed antenna array microwave system

Diamond and Related Materials ◽

10.1016/j.diamond.2020.107700 ◽

2020 ◽

Vol 103 ◽

pp. 107700 ◽

Author(s):

D. Dekkar ◽

F. Bénédic ◽

C. Falentin-Daudré ◽

A. Rangel ◽

R. Issaoui ◽

...

Keyword(s):

Antenna Array ◽

Diamond Films ◽

Biological Evaluation ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

Distributed Antenna ◽

Microwave System ◽

Titanium Substrates

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Microstructure and growth kinetics of nanocrystalline diamond films deposited in large area/low temperature distributed antenna array microwave-plasma reactor

physica status solidi (a) ◽

10.1002/pssa.201532276 ◽

2015 ◽

Vol 212 (11) ◽

pp. 2611-2615 ◽

Author(s):

Benoît Baudrillart ◽

Fabien Bénédic ◽

Ovidiu Brinza ◽

Thomas Bieber ◽

Thierry Chauveau ◽

...

Keyword(s):

Low Temperature ◽

Antenna Array ◽

Growth Kinetics ◽

Microwave Plasma ◽

Plasma Reactor ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

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Nanocrystalline diamond films grown at very low substrate temperature using a distributed antenna array microwave process: Towards polymeric substrate coating

Diamond and Related Materials ◽

10.1016/j.diamond.2017.01.001 ◽

2017 ◽

Vol 75 ◽

pp. 44-51 ◽

Author(s):

B. Baudrillart ◽

F. Bénédic ◽

Th. Chauveau ◽

A. Bartholomot ◽

J. Achard

Keyword(s):

Substrate Temperature ◽

Antenna Array ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Polymeric Substrate ◽

Nanocrystalline Diamond Films ◽

Distributed Antenna ◽

Microwave Process

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Low-temperature thermionic emission from nitrogen-doped nanocrystalline diamond films on n-type Si grown by MPCVD

Diamond and Related Materials ◽

10.1016/j.diamond.2009.05.004 ◽

2009 ◽

Vol 18 (10) ◽

pp. 1274-1277 ◽

Author(s):

Mariko Suzuki ◽

Tomio Ono ◽

Naoshi Sakuma ◽

Tadashi Sakai

Keyword(s):

Low Temperature ◽

Diamond Films ◽

Thermionic Emission ◽

Nanocrystalline Diamond ◽

Nitrogen Doped ◽

Nanocrystalline Diamond Films

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Low‐temperature deposition of diamond films for optical coatings

Applied Physics Letters ◽

10.1063/1.102106 ◽

1989 ◽

Vol 55 (20) ◽

pp. 2063-2065 ◽

Author(s):

T. P. Ong ◽

R. P. H. Chang

Keyword(s):

Low Temperature ◽

Diamond Films ◽

Optical Coatings ◽

Low Temperature Deposition ◽

Temperature Deposition

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Low temperature mechanical properties of nanocrystalline diamond films

2006 IEEE International Frequency Control Symposium and Exposition ◽

10.1109/freq.2006.275376 ◽

2006 ◽

Author(s):

Thomas H. Metcalf ◽

Brian H. Houston ◽

James E. Butler ◽

Tatyana Feygelson

Keyword(s):

Mechanical Properties ◽

Low Temperature ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films

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