Influence of Atomic Layer Deposition Temperature on the Electrical Properties of Al/ZrO2
/SiO2
/4H-SiC Metal-Oxide Semiconductor Structures
2018 ◽
Vol 215
(13)
◽
pp. 1700882
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2014 ◽
Vol 53
(4S)
◽
pp. 04EF04
◽
2011 ◽
Vol 14
(5)
◽
pp. G27
◽
2009 ◽
Vol 48
(4)
◽
pp. 04C009
◽
2004 ◽
Vol 33
(8)
◽
pp. 912-915
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