P‐13.2: Optimizing Pad Bending Structure Based on Numerical Simulation to Prevent Metal Line Crack

2021 ◽  
Vol 52 (S2) ◽  
pp. 1016-1018
Author(s):  
Min Zhou ◽  
Yifei Liu ◽  
Rong Huang ◽  
Weiran Cao ◽  
Xiaohong Jing ◽  
...  

Author(s):  
Kazuhiko Sasagawa ◽  
Masataka Hasegawa ◽  
Naoki Yoshida ◽  
Masumi Saka ◽  
Hiroyuki Abe´

It is known that the lifetime of the passivated metal line varies depending on kind and thickness of the passivation layer. The appropriate consideration of the effect of passivation on electromigration damage makes it possible to evaluate the reliability of the metal line with choosing kind or thickness of the passivation. This paper is focused on the effect of passivation thickness on the failure prediction. The failure prediction considering the passivation thickness is shown. First, the film characteristic constants depending on the passivation thickness are experimentally determined in the lines with three kinds of passivation thickness. Next, by extrapolating the obtained dependencies, the characteristic constants are determined to predict the lifetime of the line covered with the thicker passivation than that employed in the experiment, and the lifetime is predicted by the reliability evaluation method based on the numerical simulation.



Author(s):  
Kazuhiko Sasagawa ◽  
Shigeo Uno ◽  
Nao Yamaji ◽  
Masumi Saka

It is known that there is the threshold current density of the electromigration damage in the via-connected line. The evaluation of the threshold current density is one of the great interests from the viewpoint of IC reliability. In this study, a metal line with two-dimensional shape, i.e. an angled metal line is treated. The evaluation method of the threshold current density is applied to the metal line. The method is based on the numerical simulation of the building-up process of the atomic density distribution in the bamboo line by using the governing parameter for electromigration damage. Comparing the evaluated results with that of straight-shaped line, the effect of line-shape on threshold current density of electromigration damage is discussed. Furthermore, the obtained difference in the threshold current density is verified experimentally.



2021 ◽  
Vol 2021 ◽  
pp. 1-15
Author(s):  
Jiong Wang ◽  
Yang Wang ◽  
Liu Yang ◽  
Tianquan Chang ◽  
Qingping Jiang

To study the effects of anisotropy and heterogeneity on the shale failure mode and tensile strength, Brazilian splitting tests were performed from both directions of the bedding and layer thickness. Layers containing different bedding and loading angles and layer thicknesses were obtained separately. The results show that, at 0° and 90° angles, the shale cracks grow “linearly”; at 15°, the shale cracks have “arc type” growth; and at 30°–75°, the shale-splitting displays “broken line” crack propagation. The tensile strength from 0° to 90° exhibits an increasing trend. Water has a significant softening effect on the tensile strength of shale—the higher the water content, the lower the tensile strength. In addition, a 3DEC numerical simulation was used to simulate the tests, establishing shale specimen particles with random blocks. In the shale disc, uneven parallel bedding and uniform parallel bedding were set up with different loading angles and layer thicknesses to generate simulated stress-displacement curves, and the effect of layering on shale cleavage was analyzed from a mesoscopic perspective. The tensile strength of shale with uniform parallel bedding was found to be higher under the same conditions, which is consistent with the experimental results. By comparing the experimental and simulation results, from both the macro- and mesoperspectives, the Brazilian splitting crack growth of shale is affected by bedding, displaying a process from disorder to order. This study is of great significance for further exploration of the mechanical properties of shale under loading failure.



2009 ◽  
Vol 00 (00) ◽  
pp. 090904073309027-8
Author(s):  
H.W. Wang ◽  
S. Kyriacos ◽  
L. Cartilier


1999 ◽  
Vol 11 (1) ◽  
pp. 117-135
Author(s):  
P. Dineva ◽  
D. Gross ◽  
T. Rangelov




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