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Effect of rapid thermal annealing on the electrical properties of ion-beam-synthesized oxide layers using 12 keV O2+ bombardment of Si
Surface and Interface Analysis
◽
10.1002/sia.1149
◽
2001
◽
Vol 31
(12)
◽
pp. 1087-1093
Author(s):
Prakash N. K. Deenapanray
Keyword(s):
Electrical Properties
◽
Thermal Annealing
◽
Rapid Thermal Annealing
◽
Ion Beam
◽
Oxide Layers
Download Full-text
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References
Effects of rapid thermal annealing on the morphology and electrical properties of ZnO/In films
Thin Solid Films
◽
10.1016/s0040-6090(02)00072-x
◽
2002
◽
Vol 410
(1-2)
◽
pp. 8-13
◽
Cited By ~ 30
Author(s):
Tae Young Ma
◽
Dae Keun Shim
Keyword(s):
Electrical Properties
◽
Thermal Annealing
◽
Rapid Thermal Annealing
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Effects of Rapid Thermal Annealing on the Electrical Properties of Cobalt Contact top-GaN
Japanese Journal of Applied Physics
◽
10.1143/jjap.40.4450
◽
2001
◽
Vol 40
(Part 1, No. 7)
◽
pp. 4450-4453
Author(s):
Je Won Kim
◽
Seong-Il Kim
◽
Yong Tae Kim
◽
Sangsig Kim
◽
Man Young Sung
◽
...
Keyword(s):
Electrical Properties
◽
Thermal Annealing
◽
Rapid Thermal Annealing
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The effects of rapid thermal annealing and microwave annealing on the electrical properties of ZrO2 metal-insulator-metal capacitors
Optik
◽
10.1016/j.ijleo.2018.11.048
◽
2019
◽
Vol 179
◽
pp. 1057-1062
◽
Cited By ~ 1
Author(s):
Q.X. Zhang
◽
Y.P. Ge
◽
X.Q. Gu
◽
F. Peng
◽
M. Luo
Keyword(s):
Electrical Properties
◽
Thermal Annealing
◽
Rapid Thermal Annealing
◽
Metal Insulator
◽
Microwave Annealing
◽
Metal Insulator Metal
Download Full-text
Effects of the Introduction of UV Irradiation and Rapid Thermal Annealing Process to Sol-Gel Method Derived Ferroelectric Sr0.9Bi2.1Ta1.8Nb0.2O9Thin Films on Crystallization and Dielectric/Electrical Properties
Journal of the Korean Institute of Electrical and Electronic Material Engineers
◽
10.4313/jkem.2004.17.1.007
◽
2004
◽
Vol 17
(1)
◽
pp. 7-15
Keyword(s):
Electrical Properties
◽
Thermal Annealing
◽
Rapid Thermal Annealing
◽
Uv Irradiation
◽
Sol Gel
◽
Annealing Process
◽
Rapid Thermal Annealing Process
◽
Gel Method
◽
Sol Gel Method
◽
Thermal Annealing Process
Download Full-text
Improvements in Electrical Properties of n-Type-Implanted 4H-SiC Substrates Using High-Temperature Rapid Thermal Annealing
Materials Science Forum
◽
10.4028/www.scientific.net/msf.389-393.795
◽
2002
◽
Vol 389-393
◽
pp. 795-798
◽
Cited By ~ 12
Author(s):
Junji Senzaki
◽
Shinsuke Harada
◽
Ryouji Kosugi
◽
Seiji Suzuki
◽
Kenji Fukuda
◽
...
Keyword(s):
High Temperature
◽
Electrical Properties
◽
Thermal Annealing
◽
Rapid Thermal Annealing
◽
Temperature Rapid Thermal Annealing
Download Full-text
Effects of rapid thermal annealing (RTA) process on pysical and electrical properties of Bi4La4-xTi3O12 (BLT) thin film
Integrated Ferroelectrics
◽
10.1080/10584580108011938
◽
2001
◽
Vol 39
(1-4)
◽
pp. 151-159
◽
Cited By ~ 4
Author(s):
Woo Seok Yang
◽
Nam Kyeong Kim
◽
Seung Jin Yeom
◽
Soon Yong Kweon
◽
Eun Seok Choi
◽
...
Keyword(s):
Thin Film
◽
Electrical Properties
◽
Thermal Annealing
◽
Rapid Thermal Annealing
Download Full-text
Effect of rapid thermal annealing on the electrical properties of dilute GaAsPN based diodes
Semiconductor Science and Technology
◽
10.1088/1361-6641/ab3671
◽
2019
◽
Vol 34
(10)
◽
pp. 105009
Author(s):
H A Alburaih
◽
H Albalawi
◽
M Henini
Keyword(s):
Electrical Properties
◽
Thermal Annealing
◽
Rapid Thermal Annealing
Download Full-text
Phase evolution and electrical properties of Co–Sb alloys fabricated from Co/Sb bilayers by thermal annealing and ion beam mixing
Physical Chemistry Chemical Physics
◽
10.1039/c5cp03360h
◽
2015
◽
Vol 17
(37)
◽
pp. 24427-24437
◽
Cited By ~ 12
Author(s):
Manju Bala
◽
Compesh pannu
◽
Srashti Gupta
◽
Tripurari S. Tripathi
◽
Surya K. Tripathi
◽
...
Keyword(s):
Thin Films
◽
Electrical Properties
◽
Thermoelectric Power
◽
Thermal Annealing
◽
Ion Beam
◽
Phase Evolution
◽
Ion Beam Mixing
◽
Power Enhancement
Thermoelectric power enhancement of ion beam synthesized Co–Sb alloy thin films.
Download Full-text
Microstructural studies of epitaxial CoSi2layers on silicon produced by ion beam synthesis and rapid thermal annealing
Journal of Applied Physics
◽
10.1063/1.355029
◽
1993
◽
Vol 74
(12)
◽
pp. 7129-7133
◽
Cited By ~ 9
Author(s):
C. D. Meekison
◽
G. R. Booker
◽
K. J. Reeson
◽
R. S. Spraggs
◽
R. M. Gwilliam
◽
...
Keyword(s):
Thermal Annealing
◽
Rapid Thermal Annealing
◽
Ion Beam
◽
Ion Beam Synthesis
◽
Microstructural Studies
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Effects of rapid thermal annealing on the electrical properties of heavily carbon-doped InGaAs
Solid State Communications
◽
10.1016/0038-1098(95)00791-1
◽
1996
◽
Vol 98
(5)
◽
pp. 475-478
Author(s):
Chang-Sik Son
◽
Seong-Il Kim
◽
Tae-Geun Kim
◽
Yong Kim
◽
Moo-Sung Kim
◽
...
Keyword(s):
Electrical Properties
◽
Thermal Annealing
◽
Rapid Thermal Annealing
◽
Carbon Doped
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