Critical Dimension Atomic Force Microscopy for Sub-50-nm Microelectronics Technology Nodes

2007 ◽  
pp. 31-75 ◽  
Author(s):  
Hao-Chih Liu ◽  
Gregory A. Dahlen ◽  
Jason R. Osborne
Keyword(s):  
Atomic Force Microscopy ◽  
Critical Dimension ◽  
Force Microscopy ◽  
Atomic Force ◽  
Microelectronics Technology ◽  
Technology Nodes

Strategies for nanoscale contour metrology using critical dimension atomic force microscopy

2011 ◽  
Author(s):  
Ndubuisi G. Orji ◽  
Ronald G. Dixson ◽  
András E. Vládar ◽  
Michael T. Postek
Keyword(s):  
Atomic Force Microscopy ◽  
Critical Dimension ◽  
Force Microscopy ◽  
Atomic Force

General algorithm and method for scanning a via hole by using critical-dimension atomic force microscopy

2014 ◽  
Vol 64 (11) ◽  
pp. 1643-1647 ◽  
Author(s):  
Yongho Seo ◽  
Jun-Young Park ◽  
K. B. Kim ◽  
Naesung Lee
Keyword(s):  
Atomic Force Microscopy ◽  
Critical Dimension ◽  
General Algorithm ◽  
Force Microscopy ◽  
Atomic Force ◽  
Via Hole

Defect Localization Enhancement Using Light Induced CI-AFP

2014 ◽  
Author(s):  
N. Dayanand ◽  
A.C.T. Quah ◽  
C.Q. Chen ◽  
S.P. Neo ◽  
G.B. Ang ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Advanced Technology ◽  
Induced Current ◽  
Force Microscopy ◽  
Atomic Force ◽  
Photovoltaic Effects ◽  
Defect Localization ◽  
Technology Nodes

Abstract This paper describes the effectiveness of using light induced Current Imaging – Atomic Force Microscopy (CIAFP) to localize defects that are not easily detected through conventional CI-AFP. Defect localization enhancement for both memory and logic failures has been demonstrated. For advanced technology nodes memory failures, current imaging from photovoltaic effects enhanced the detection of bridging between similar types of junctions. Light induced effects also helped to improve the distinction between gated and nongated diode, as a result enhanced localization of gate to source/drain short.

Large-Scale Fabrication of Carbon Nanotube Probe Tips for Atomic Force Microscopy Critical Dimension Imaging Applications

Nano Letters ◽  
2004 ◽  
Vol 4 (7) ◽  
pp. 1301-1308 ◽  
Author(s):  
Qi Ye ◽  
Alan M. Cassell ◽  
Hongbing Liu ◽  
Kuo-Jen Chao ◽  
Jie Han ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Carbon Nanotube ◽  
Large Scale ◽  
Critical Dimension ◽  
Force Microscopy ◽  
Atomic Force
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