Evaluation of Accelerator-based Secondary Ion Mass Spectrometry for the Ultra-trace Elemental Characterization of Bulk Silicon

Author(s):  
R. J. Blattner ◽  
J. C. Huneke ◽  
M. D. Strathman ◽  
R. S. Hockett ◽  
W. E. Kieser ◽  
...  
2008 ◽  
Vol 80 (15) ◽  
pp. 5986-5992 ◽  
Author(s):  
Sutapa Ghosal ◽  
Stewart J. Fallon ◽  
Terrance J. Leighton ◽  
Katherine E. Wheeler ◽  
Michael J. Kristo ◽  
...  

Nanoscale ◽  
2017 ◽  
Vol 9 (44) ◽  
pp. 17571-17575 ◽  
Author(s):  
Paweł Piotr Michałowski ◽  
Piotr Gutowski ◽  
Dorota Pierścińska ◽  
Kamil Pierściński ◽  
Maciej Bugajski ◽  
...  

Non-uniform oxygen contamination in the superlattice region of a quantum cascade laser measured by secondary ion mass spectrometry.


2020 ◽  
Vol 35 (12) ◽  
pp. 2997-3006
Author(s):  
Agnieszka Priebe ◽  
Tianle Xie ◽  
Laszlo Pethö ◽  
Johann Michler

Enhancing the spatial resolution of TOF-SIMS, which provides 3D elemental distribution in combination with high sensitivity and molecular information, is currently one of the hottest topics in the field of chemical analysis at the nanoscale.


Sign in / Sign up

Export Citation Format

Share Document