Evaluation of Accelerator-based Secondary Ion Mass Spectrometry for the Ultra-trace Elemental Characterization of Bulk Silicon
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2002 ◽
Vol 33
(12)
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pp. 924-931
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1980 ◽
Vol 74
(1)
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pp. 150-162
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2009 ◽
Vol 60
(1)
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pp. 60-64
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1991 ◽
Vol 9
(4)
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pp. 2402-2404
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