Three-Dimensional Feature-Scale Modeling of CMP

Author(s):  
Jianfeng Luo ◽  
David A. Dornfeld
Author(s):  
Chaojian Chen ◽  
Mikhail Kruglyakov ◽  
Alexey Kuvshinov

Summary Most of the existing three-dimensional (3-D) electromagnetic (EM) modeling solvers based on the integral equation (IE) method exploit fast Fourier transform (FFT) to accelerate the matrix-vector multiplications. This in turn requires a laterally-uniform discretization of the modeling domain. However, there is often a need for multi-scale modeling and inversion, for instance, to properly account for the effects of non-uniform distant structures, and at the same time, to accurately model the effects from local anomalies. In such scenarios, the usage of laterally-uniform grids leads to excessive computational loads, both in terms of memory and time. To alleviate this problem, we developed an efficient 3-D EM modeling tool based on a multi-nested IE approach. Within this approach, the IE modeling is first performed at a large domain and on a (laterally-uniform) coarse grid, and then the results are refined in the region of interest by performing modeling at a smaller domain and on a (laterally-uniform) denser grid. At the latter stage, the modeling results obtained at the previous stage are exploited. The lateral uniformity of the grids at each stage allows us to keep using the FFT for the matrix-vector multiplications. An important novelty of the paper is a development of a “rim domain” concept which further improves the performance of the multi-nested IE approach. We verify the developed tool on both idealized and realistic 3-D conductivity models, and demonstrate its efficiency and accuracy.


Water ◽  
2018 ◽  
Vol 10 (11) ◽  
pp. 1636 ◽  
Author(s):  
Roshina Babu ◽  
Namsik Park ◽  
Sunkwon Yoon ◽  
Taaniela Kula

Sustainable management of small island freshwater resources requires an understanding of the extent of freshwater lens and local effects of pumping. In this study, a methodology based on a sharp interface approach is developed for regional and well scale modeling of island freshwater lens. A quasi-three-dimensional finite element model is calibrated with freshwater thickness where the interface is matched to the lower limit of the freshwater lens. Tongatapu Island serves as a case study where saltwater intrusion and well salinization for the current state and six long-term stress scenarios of reduced recharge and increased groundwater pumping are predicted. Though no wells are salinized currently, more than 50% of public wells are salinized for 40% decreased recharge or increased groundwater pumping at 8% of average annual recharge. Risk of salinization for each well depends on the distance from the center of the well field and distance from the lagoon. Saltwater intrusions could occur at less than 50% of the previous estimates of sustainable groundwater pumping where local pumping was not considered. This study demonstrates the application of a sharp interface groundwater model for real-world small islands when dispersion models are challenging to be implemented due to insufficient data or computational resources.


2014 ◽  
Vol 13 (1) ◽  
pp. 011203 ◽  
Author(s):  
Armen Kteyan ◽  
Gevorg Gevorgyan ◽  
Henrik Hovsepyan ◽  
Jun-Ho Choy ◽  
Valeriy Sukharev

2019 ◽  
Vol 196 ◽  
pp. 1-17 ◽  
Author(s):  
Shiliang Yang ◽  
Hua Wang ◽  
Yonggang Wei ◽  
Jianhang Hu ◽  
Jia Wei Chew

2008 ◽  
Vol 45 (2) ◽  
pp. 238-251 ◽  
Author(s):  
Adam Szymkiewicz ◽  
Jolanta Lewandowska ◽  
Rafael Angulo-Jaramillo ◽  
Joanna Butlańska

In this paper the development and experimental validation of a numerical model of two-dimensional unsaturated flow in a double-porosity medium is presented. The model is based on the coupled formulation for flow in macro- and micropores obtained by homogenization. It was applied to simulate the axisymmetrical tension disk infiltration experiments that were carried out in a double-porosity medium. The physical model was a three-dimensional periodic structure, composed of porous spheres made of sintered clay and embedded in Hostun fine sand HN38. The hydraulic parameters of both porous materials were determined by inverse analysis of independent infiltration experiments performed on sand and sintered clay. The effective parameters of the double-porosity medium were calculated from the solution of the local boundary value problem, obtained from the homogenization procedure. The cumulative infiltration curve and the global dimensions of the humidified zone obtained from the numerical solution are in good agreement with the observations. Moreover, numerical simulations showed the existence of a narrow zone of local nonequilibrium that moves with the infiltration front. Upstream of this zone, the infiltration bulb is in the local equilibrium conditions.


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