In-depth modifications of implanted amorphous carbon films
1994 ◽
Vol 59
(6)
◽
pp. 667-672
◽
1990 ◽
Vol 48
(1)
◽
pp. 318-319
2019 ◽
Vol 96
◽
pp. 74-84
◽
2008 ◽
Vol 145
(4)
◽
pp. 186-191
◽
2019 ◽
Vol 40
(1)
◽
pp. 387-406