Preparation and characterization of Y-system superconducting thin films by mist microwave-plasma chemical vapour deposition

1996 ◽  
Vol 31 (11) ◽  
pp. 2897-2902
Author(s):  
N. Takahashi ◽  
A. Koukitu ◽  
H. Seki
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Superconducting Thin Films ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition

Microwave plasma chemical vapour deposition of diamond like carbon thin films

1998 ◽  
Vol 278 (1-2) ◽  
pp. 130-134 ◽  
Author(s):  
D.S Patil ◽  
K Ramachandran ◽  
N Venkatramani ◽  
M Pandey ◽  
S Venkateswaran ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition ◽  
Carbon Thin Films
Sign in / Sign up

Export Citation Format

Share Document