Spatially resolved optical emission studies of fluorocarbon RF plasma through the use of UV-transmitting optical fibers
1985 ◽
Vol 5
(2)
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pp. 183-199
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2013 ◽
Vol 10
(84)
◽
pp. 20130296
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1988 ◽
Vol 89
(10)
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pp. 6103-6112
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Keyword(s):
1989 ◽
Vol 134
◽
pp. 452-453
Keyword(s):