Applications of atomic layer chemical vapor deposition for the processing of nanolaminate structures
2002 ◽
Vol 19
(3)
◽
pp. 451-462
◽
2016 ◽
Vol 34
(3)
◽
pp. 892-897
◽
2000 ◽
Vol 18
(4)
◽
pp. 1595-1598
◽
2020 ◽
Vol 13
(7)
◽
pp. 1997-2023
◽
2019 ◽
Vol 37
(6)
◽
pp. 060903
◽
Keyword(s):
1999 ◽
Vol 38
(Part 1, No. 12A)
◽
pp. 6817-6820
◽
2005 ◽
Vol 8
(1-3)
◽
pp. 121-124
◽
Keyword(s):