Effect of rapid thermal annealing on the structural and electrical properties of TiO2 thin films prepared by plasma enhanced CVD

1998 ◽  
Vol 15 (2) ◽  
pp. 217-222 ◽  
Author(s):  
Jong-Wha Kim ◽  
Do-Oh Kim ◽  
Yoon-Bong Hahn
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Tio2 Thin Films ◽  
Plasma Enhanced Cvd ◽  
Structural And Electrical Properties

The effect of rapid thermal annealing on structural and electrical properties of TiB2 thin films

1997 ◽  
Vol 300 (1-2) ◽  
pp. 272-277 ◽  
Author(s):  
B. Todorović ◽  
T. Jokić ◽  
Z. Rakočević ◽  
Z. Marković ◽  
B. Gaković ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Structural And Electrical Properties

Effect of thermal annealing on structural and electrical properties of tio2 thin films

2020 ◽  
Vol 710 ◽  
pp. 138262
Author(s):  
Nagabharana RM ◽  
Kumaraswamy GN ◽  
Susheel Kumar Gundanna ◽  
Umananda M. Bhatta
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Thermal Annealing ◽  
Tio2 Thin Films ◽  
Structural And Electrical Properties
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