A capacitance and optical method for the static and dynamic characterization of micro electro mechanical systems (MEMS) devices

2006 ◽  
Vol 12 (10-11) ◽  
pp. 1053-1061 ◽  
Author(s):  
Eleonora Ferraris ◽  
Irene Fassi ◽  
Biagio De Masi ◽  
Richard Rosing ◽  
Andrew Richardson
Keyword(s):  
Optical Method ◽  
Mechanical Systems ◽  
Mems Devices ◽  
Dynamic Characterization ◽  
Micro Electro Mechanical Systems

Experimental Modal Characterization of MEMS Switches

2011 ◽  
Vol 403-408 ◽  
pp. 4598-4605
Author(s):  
Joel M. Book ◽  
Samuel F. Asokanthan ◽  
Tian Fu Wang
Keyword(s):  
Modal Analysis ◽  
Mechanical Systems ◽  
Noise Signal ◽  
Experimental Modal Analysis ◽  
Modal Parameters ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Mems Switches ◽  
Stochastic Subspace Identification

MEMS devices, Micro Electro-Mechanical Systems, are electrical and mechanical systems with characteristic dimensions on the order of microns. Since these systems have moving mechanical parts, characterization of their dynamics, including their modal parameters, is highly desirable. This paper describes the validation of an existing implementation of the Stochastic Subspace Identification (SSI) algorithm, called MACEC, for experimental modal analysis of a micro-cantilever switch. A white noise signal applied to the built-in electrostatic actuator in the switches excited a response measured using microscanning Laser Doppler Vibrometry (LDV). The modal parameters found using MACEC matched well those predicted by theory, thus validating this combination for experimental modal analysis of MEMS structures.

Growth and Characterization of 3C-SiC Films for Micro Electro Mechanical Systems (MEMS) Applications

2009 ◽  
Vol 9 (11) ◽  
pp. 4852-4859 ◽  
Author(s):  
Matteo Bosi ◽  
Bernard E. Watts ◽  
Giovanni Attolini ◽  
Claudio Ferrari ◽  
Cesare Frigeri ◽  
...  
Keyword(s):  
Mechanical Systems ◽  
Micro Electro Mechanical Systems ◽  
Sic Films

scholarly journals Micro-electro-mechanical systems (MEMS): Technology for the 21st century

2014 ◽  
Vol 68 (5) ◽  
pp. 629-641 ◽  
Author(s):  
Tatjana Djakov ◽  
Ivanka Popovic ◽  
Ljubinka Rajakovic
Keyword(s):  
21St Century ◽  
Low Cost ◽  
Mechanical Systems ◽  
Modern Society ◽  
Global Scale ◽  
Thermal Constant ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Industrial Sectors ◽  
Mems Technology

Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

Characterization of polycrystalline SiC layers grown by ECR-PECVD for micro-electro-mechanical systems

2003 ◽  
Vol 427 (1-2) ◽  
pp. 187-190 ◽  
Author(s):  
C. Ricciardi ◽  
E. Bennici ◽  
M. Cocuzza ◽  
P. Mandracci ◽  
D. Bich ◽  
...  
Keyword(s):  
Mechanical Systems ◽  
Micro Electro Mechanical Systems

Micro-Electro-Mechanical Systems (MEMS) Micro-Heater

2012 ◽  
Author(s):  
C. N. Janakos ◽  
F. T. Goericke ◽  
A. P. Pisano
Keyword(s):  
Mechanical Systems ◽  
Testing Device ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Mems Packaging ◽  
Rate Table ◽  
Heating Device ◽  
Localized Heating

This research addresses the problem of not having access to a localized heating device that easily integrates a variety of testing needs with MEMS packaging. This device can heat MEMS while simultaneously in vacuum, exposed to harsh gases and on a rate table. The solution is a micro-heater built directly into its packaging with the capability to test MEMS at vacuum, which can be pumped down to 1 Torr in a fraction of a second and heats the device to approximately 170 degrees Celsius to simulate the temperatures MEMS devices endure. This packaging integrated with a testing device can accommodate a broad range of MEMS devices.

scholarly journals Toward Operations in a Surgical Scenario: Characterization of a Microgripper via Light Microscopy Approach

2019 ◽  
Vol 9 (9) ◽  
pp. 1901 ◽  
Author(s):  
Federica Vurchio ◽  
Pietro Ursi ◽  
Francesco Orsini ◽  
Andrea Scorza ◽  
Rocco Crescenzi ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Statistical Analysis ◽  
Scanning Electron Microscope ◽  
Light Microscopy ◽  
Mechanical Systems ◽  
Optical Microscope ◽  
Micro Electro Mechanical Systems ◽  
Mems Technology ◽  
Scanning Electron

Micro Electro Mechanical Systems (MEMS)-Technology based micro mechanisms usually operate within a protected or encapsulated space and, before that, they are fabricated and analyzed within one Scanning Electron Microscope (SEM) vacuum specimen chamber. However, a surgical scenario is much more aggressive and requires several higher abilities in the microsystem, such as the capability of operating within a liquid or wet environment, accuracy, reliability and sophisticated packaging. Unfortunately, testing and characterizing MEMS experimentally without fundamental support of a SEM is rather challenging. This paper shows that in spite of large difficulties due to well-known physical limits, the optical microscope is still able to play an important role in MEMS characterization at room conditions. This outcome is supported by the statistical analysis of two series of measurements, obtained by a light trinocular microscope and a profilometer, respectively.

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