Experimental Modal Characterization of MEMS Switches

MEMS devices, Micro Electro-Mechanical Systems, are electrical and mechanical systems with characteristic dimensions on the order of microns. Since these systems have moving mechanical parts, characterization of their dynamics, including their modal parameters, is highly desirable. This paper describes the validation of an existing implementation of the Stochastic Subspace Identification (SSI) algorithm, called MACEC, for experimental modal analysis of a micro-cantilever switch. A white noise signal applied to the built-in electrostatic actuator in the switches excited a response measured using microscanning Laser Doppler Vibrometry (LDV). The modal parameters found using MACEC matched well those predicted by theory, thus validating this combination for experimental modal analysis of MEMS structures.

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Modal Characterization of MEMS Switches via Output Only and Input/Output Identification Methods

Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference ◽

10.1115/detc2011-48888 ◽

2011 ◽

Author(s):

Joel M. Book ◽

Samuel F. Asokanthan

Keyword(s):

Modal Analysis ◽

Noise Signal ◽

Experimental Modal Analysis ◽

Modal Parameters ◽

Identification Algorithm ◽

Base Excitation ◽

Mems Devices ◽

Stochastic Subspace Identification ◽

Output Only

MEMS devices typically have moving or oscillating mechanical parts, and characterization of their dynamics, including their modal parameters, is highly desirable. This paper is concerned with experimental implementation of a Stochastic Subspace Identification (SSI) algorithm as well a base excitation based identification algorithm for experimental modal analysis of a micro-cantilever switch. A white noise signal applied to the built-in electrostatic actuator in the switches excited a response measured using microscanning Laser Doppler Vibrometry (LDV). In the case of identification via the SSI, only the output response was used while the base excitation based algorithm employed the input and the output signals. The modal parameters found using MACEC matched well with those predicted by theory, and the results obtained via the two experimental identification approaches are in good agreement, thus providing confidence in using the SSI approach for experimental modal analysis of MEMS structures.

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Experimental Modal Analysis of Motorized Spindle Based on Stochastic Subspace Identification

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.103.469 ◽

2011 ◽

Vol 103 ◽

pp. 469-474

Author(s):

Jie Meng ◽

Xiao An Chen

Keyword(s):

Modal Analysis ◽

Dynamic Characteristics ◽

Time Domain ◽

Experimental Modal Analysis ◽

Modal Parameters ◽

Vibration Velocity ◽

Subspace Identification ◽

Motorized Spindle ◽

Stochastic Subspace Identification ◽

The Time Domain

Experimental modal analysis is done to the grinding motorized spindle under 36000r/min. The corresponding theory and experimental plan are introduced. The time domain waveform is gained and the maximum vibration velocity is worked out. Stochastic Subspace Identification (SSI) is applied to study dynamic characteristics of motorized spindle which is running idle, then modal parameters are extracted. The correctness of the experimental method is validated, which has certain referential importance.

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A capacitance and optical method for the static and dynamic characterization of micro electro mechanical systems (MEMS) devices

Microsystem Technologies ◽

10.1007/s00542-006-0163-6 ◽

2006 ◽

Vol 12 (10-11) ◽

pp. 1053-1061 ◽

Cited By ~ 2

Author(s):

Eleonora Ferraris ◽

Irene Fassi ◽

Biagio De Masi ◽

Richard Rosing ◽

Andrew Richardson

Keyword(s):

Optical Method ◽

Mechanical Systems ◽

Mems Devices ◽

Dynamic Characterization ◽

Micro Electro Mechanical Systems

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Effect of Bass Bar Tension on Modal Parameters of a Violin's Top Plate

Archives of Acoustics ◽

10.2478/aoa-2014-0015 ◽

2015 ◽

Vol 39 (1) ◽

pp. 145-149 ◽

Cited By ~ 3

Author(s):

Ewa B. Skrodzka ◽

Bogumił B.J. Linde ◽

Antoni Krupa

Keyword(s):

Modal Analysis ◽

Experimental Modal Analysis ◽

Mode Shapes ◽

Modal Parameters ◽

Normal Value ◽

Modal Damping

Abstract Experimental modal analysis of a violin with three different tensions of a bass bar has been performed. The bass bar tension is the only intentionally introduced modification of the instrument. The aim of the study was to find differences and similarities between top plate modal parameters determined by a bass bar perfectly fitting the shape of the top plate, the bass bar with a tension usually applied by luthiers (normal), and the tension higher than the normal value. In the modal analysis four signature modes are taken into account. Bass bar tension does not change the sequence of mode shapes. Changes in modal damping are insignificant. An increase in bass bar tension causes an increase in modal frequencies A0 and B(1+) and does not change the frequencies of modes CBR and B(1-).

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Growth and Characterization of 3C-SiC Films for Micro Electro Mechanical Systems (MEMS) Applications

Crystal Growth & Design ◽

10.1021/cg900677c ◽

2009 ◽

Vol 9 (11) ◽

pp. 4852-4859 ◽

Cited By ~ 31

Author(s):

Matteo Bosi ◽

Bernard E. Watts ◽

Giovanni Attolini ◽

Claudio Ferrari ◽

Cesare Frigeri ◽

...

Keyword(s):

Mechanical Systems ◽

Micro Electro Mechanical Systems ◽

Sic Films

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Some Remarks on the Identification of Damping Parameters at the Boundary of Vibrating Systems

Applied Mechanics Reviews ◽

10.1115/1.3005057 ◽

1995 ◽

Vol 48 (11S) ◽

pp. S107-S110

Author(s):

Peter Hagedorn ◽

Ulrich Pabst

Keyword(s):

Mathematical Modeling ◽

Modal Analysis ◽

Mechanical Systems ◽

Experimental Modal Analysis ◽

Steel Beam ◽

Modal Data ◽

Stiffness And Damping ◽

Parameter Values ◽

Vibrating Systems

In many cases, vibrating mechanical systems permit a reliable mathematical modeling with parameter values which are reasonably well known beforehand, except for the joints between different subsystems and at the boundaries. The boundary stiffness, which is often assumed as infinite, and the damping at the boundary, which is frequently ignored, are typically not well known. In this note, we discuss the identification of the boundary stiffness and damping parameters from modal data. As an example, we treat an elastic steel beam, for which an experimental modal analysis had been carried out in our laboratory.

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Identification of Modal Parameters of an Elastic Rotor With Oil Film Bearings

Journal of Vibration and Acoustics ◽

10.1115/1.3269138 ◽

1984 ◽

Vol 106 (1) ◽

pp. 107-112 ◽

Cited By ~ 18

Author(s):

Rainer Nordmann

Keyword(s):

Modal Analysis ◽

Dynamic Behavior ◽

Design Process ◽

Mechanical Engineering ◽

Mechanical Systems ◽

Rotating Machinery ◽

Modal Parameters ◽

Powerful Method ◽

Oil Film ◽

Engineering Problems

Investigations of the dynamic behavior of structures have become increasingly important in the design process of mechanical systems. To have a better understanding of the dynamic behavior of a structure, the knowledge of the modal parameters is very important. The powerful method of experimental modal analysis has been used to measure modal parameters in many mechanical engineering problems. But the method was mainly applied to nonrotating structures. This presentation shows improvements of the classical modal analysis for a successful application in rotating machinery with nonconservative effects. An example is given, investigating the modal parameters of an elastic rotor with oil film bearings.

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Micro-electro-mechanical systems (MEMS): Technology for the 21st century

Hemijska industrija ◽

10.2298/hemind131008091d ◽

2014 ◽

Vol 68 (5) ◽

pp. 629-641 ◽

Cited By ~ 2

Author(s):

Tatjana Djakov ◽

Ivanka Popovic ◽

Ljubinka Rajakovic

Keyword(s):

21St Century ◽

Low Cost ◽

Mechanical Systems ◽

Modern Society ◽

Global Scale ◽

Thermal Constant ◽

Mems Devices ◽

Micro Electro Mechanical Systems ◽

Industrial Sectors ◽

Mems Technology

Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

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